A shadow moiré profile measurement device, its calibration method and measurement method

A technology of contour measurement and measurement method, which is applied in the field of shadow moiré contour measurement devices, can solve the problems of long measurement time and low precision of the measured object, and achieve the effects of increasing complexity, improving measurement speed, and improving measurement efficiency

Active Publication Date: 2017-08-22
XIAN TECH UNIV
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Problems solved by technology

[0003] The object of the present invention is to provide a shadow moiré profile measurement device, its calibration method and measurement method, so as to overcome the problems that the existing phase shift shadow moiré measurement device and measurement method take a long time to measure the measured object and have low precision

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  • A shadow moiré profile measurement device, its calibration method and measurement method
  • A shadow moiré profile measurement device, its calibration method and measurement method

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Embodiment Construction

[0025] Below in conjunction with accompanying drawing, the present invention is further described, as figure 1 A shadow moiré profile measuring device shown, said measuring device comprising three line light sources 1 of red, green and blue, a color CCD camera 2, a grating 3 and a precision displacement platform; said red, green , blue, three line light sources 1 and the color CCD camera 2 are collinearly arranged on one side of the grating 3 and parallel to the grating surface; the grating 3 is arranged on a precision displacement platform, and the precision displacement platform is a manual precision displacement platform or an electric precision The displacement platform, the precision displacement platform can drive the grating 3 to move along the direction perpendicular to the grating surface; the three line light sources 1 of red, green and blue are arranged at equal intervals or approximately equal intervals on one side of the color CCD camera 2 .

[0026] The following...

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Abstract

The invention provides a shadow moiré profile measurement device, its calibration method and measurement method. The measurement device includes three line light sources of red, green and blue, a color CCD camera, a grating and a precision displacement platform; red, green and blue The three line light sources and the color CCD camera are collinearly arranged on one side of the grating and parallel to the grating surface; the grating is set on a precision displacement platform; the three line light sources of red, green and blue are arranged on the color CCD camera side. The present invention also provides a calibration method and a measurement method for the above-mentioned shadow moiré profile measurement device. The invention overcomes the problems that the existing phase-shift shadow moiré measurement device and measurement method take a long time to measure the measured object and have low precision.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, in particular to a shadow moiré profile measurement device, a calibration method and a measurement method thereof. Background technique [0002] Shadow Moiré profilometry has high precision and has become the preferred technique for measuring the deformation of objects under heat or force. Moreover, the JEDEC high temperature measurement industry standard also recommends the shadow Moire method as one of the main techniques for this type of measurement. So far, a large number of documents have reported the application of shadow moiré technology in the IC industry, and related documents are still emerging. These applications include chip package surface profile measurement, silicon wafer flatness measurement, and topography measurement of silicon wafer integrated circuits. However, with the continuous reduction of electronic packages and the diversification of designs, the ...

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/25
Inventor 杜虎兵王建华卢春春尹培丽
Owner XIAN TECH UNIV
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