Flexoelectric effect-based three-dimensional flow rate-of-change sensor and measuring method
A flexoelectric effect and rate-of-change technology, applied in the field of sensors, can solve problems such as small effective components and environmental threats, and achieve the effects of reducing power demand, good real-time performance, and easy use.
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[0048] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0049] like figure 1 , figure 2 and image 3 As shown, a three-dimensional flow velocity change rate sensor based on the flexoelectric effect of the present invention includes an L-shaped three-dimensional main body element 1, one end of the L-shaped three-dimensional main body element 1 is consolidated on the substrate, and the other end is connected to a spherical insulating material 2, The L-shaped three-dimensional main body element 1 includes an L-shaped hollow cavity insulating layer 3, which runs through the flexoelectric material layer 3-1 arranged inside the L-shaped hollow cavity insulating layer 3, wherein the length of the flexoelectric material layer 3-1, The width and height are smaller than the length, width and height of the hollow cavity of the L-shaped hollow cavity insulating layer 3; in a section inside the L-sh...
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