Three-degree-of-freedom micro-positioning platform based on symmetrical double compliant hinge

Abstract

The invention provides a three-degree-of-freedom micro-positioning platform based on a symmetrical double compliant hinge. The three-degree-of-freedom micro-positioning platform comprises fixed platforms, a movable platform, drivers and three lever amplifying mechanisms, wherein the drivers are arranged on the fixed platforms; the three lever amplifying mechanisms are used for connecting the fixed platforms with the movable platform; the three lever amplifying mechanisms are uniformly distributed on the periphery of the movable platform, and connected with the fixed platforms, the movable platform and the drivers respectively; each lever amplifying mechanism comprises a movable lever, a double compliant hinge and a guide mechanism which is provided with the double compliant hinge; the movable levers are connected with the fixed platforms and the drivers respectively through the double compliant hinges, and connected with the movable platform through the guide mechanisms; and the double compliant hinges are symmetrical double compliant hinges. Through adoption of the micro-positioning platform, the displacement positioning accuracy can be increased and travel being as large as possible is obtained on the premise thatvarious conditions such as installation space and fixed frequency are satisfied. The micro-positioning platform has a function of correcting a displacement output, and displacement is output as linearly as possible, so that coupled displacement is reduced.

Description

technical field [0001] The invention relates to the field of manufacturing technology, more specifically, to a three-degree-of-freedom micro-positioning platform based on symmetrical double-compliant hinges. Background technique [0002] In recent years, with the rapid development and wide application of micro / nano manufacturing technology, higher requirements have been placed on precision positioning technology, one of the core key technologies of micro / nano manufacturing equipment. The micro-positioning platform is a working platform for precise positioning, which generally consists of a micro-positioning mechanism, a driver, and a displacement sensor that provides position feedback for the control system. The compliant mechanism uses a flexible hinge to replace the traditional mechanism's kinematic joints. It has the advantages of no mechanical friction, no gap, high motion sensitivity, and simple processing. It has been widely used as a transmission mechanism in the fiel...

AI Technical Summary

Problems solved by technology

However, for a single compliant hinge, when an axial load is applied, the compliant hinge is dented and cannot produce axial linear displacement, which greatly affects the displacement positioning accuracy of the micro-positioning platform

[0004] At the same time, the micro-displacement amplification mechanism in the micro-positioning platform often adopts a lever amplification mechanism connected by a single compliant hinge. Through this mechanism, the displacement output of the micro-positioning platform can be amplified; Therefore, whenever the compliant hinge is elastically deformed, the displacement output of the micro-positioning platform will have a coupling phenomenon between the displacement input and the displacement output, especially the greater the magnification of the amplification mechanism, the greater the coupling phenomenon. obvious

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