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Actuator plate segmentation and control apparatus and methods

An actuation and system device technology, which can be used in microstructure devices, microelectronic microstructure devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., and can solve problems such as the limitation of tuning range of MEMS tunable capacitors

Active Publication Date: 2018-04-20
AAC TECH PTE LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the tuning range of MEMS tunable capacitors can be limited by factors such as parasitic capacitance
In addition, device performance may be affected by factors such as adhesion forces between the movable parts and the substrate

Method used

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  • Actuator plate segmentation and control apparatus and methods
  • Actuator plate segmentation and control apparatus and methods
  • Actuator plate segmentation and control apparatus and methods

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Embodiment Construction

[0021] The subject matter provides apparatus and methods for MEMS variable capacitors. In one aspect, the present subject matter provides configurations of MEMS variable capacitors that exhibit improved cycle life, allow for improved capacitor contact, enable snap pull-in characteristics desirable for stable dual-stage operation, And reduce actuator stiction, contact force, charging, failure, cycling and / or hold down. To achieve these advantages, the present subject matter relates to MEMS devices having independently controllable actuation electrodes and methods for controlling the actuation electrodes to adjust the shape of a movable member. In some implementations, the present subject matter provides a multilevel tunable capacitor in which individual bits (eg, 1 / 8, 1 / 4, 1 / 2 pF) can be integrated into a single multilevel switch. This tunable capacitor may comprise a movable part with the actuator plate fixed on the surface of the part. The actuator plate can be divided into...

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Abstract

Apparatus and methods are provided for manipulating a segmented actuator plate to obtain a desired shape of a movable part of a microelectromechanical system (MEMS) device. In some implementations, the subject matter described herein can include a microelectromechanical system (MEMS) device comprising: a plurality of actuation electrodes attached to a first surface, wherein the one or more actuation electrodes each of the movable electrodes is independently controllable; and a movable member spaced apart from and movable relative to the first surface, wherein the movable member further comprises a fixed One or more movable actuation electrodes separated by the actuation electrodes.

Description

[0001] priority claim [0002] This application claims the benefit of US Provisional Patent Application Serial No. 61 / 792,201, filed March 15, 2013, which is hereby incorporated by reference in its entirety. technical field [0003] The subject matter disclosed herein relates generally to the operation of microelectromechanical systems (MEMS) devices. More specifically, the subject matter disclosed herein relates to devices and methods for actuating movement of movable components of MEMS devices. Background technique [0004] Micro-electro-mechanical systems (MEMS) technology is widely used in the wireless communication industry to enhance the performance of existing devices based on structural or operational principles. For example, MEMS tunable capacitors can be developed using micromachining techniques and used as part of a voltage-controlled oscillator. As RF components, MEMS tunable capacitors can be microfabricated on silicon substrates and integrated with active cir...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B81B7/02H01G5/14
CPCH01G5/18H01G4/1227B81B3/0051B81B3/0056B81B2201/0221B81B2203/04B81B2203/053B81B3/001
Inventor 达娜·德勒斯肖恩·J·坎宁安阿瑟·S·莫里斯
Owner AAC TECH PTE LTD