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Substrate baking device

A technology for baking devices and substrates, applied in optics, instruments, electrical components, etc., can solve problems such as aggravating smoke

Active Publication Date: 2016-01-13
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, this also exacerbates the problem of smog production

Method used

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Embodiment Construction

[0023] Exemplary embodiments of the inventive concept will be described in detail below in conjunction with the accompanying drawings, however, the accompanying drawings only schematically illustrate specific examples of the inventive concept and are not intended to be limiting. However, it should be understood by those skilled in the art that various modifications and variations can be made to the embodiments without departing from the scope of protection of the present inventive concept defined by the claims.

[0024] figure 1 is a schematic diagram of a substrate baking apparatus according to an exemplary embodiment of the present inventive concept. Such as figure 1 As shown in , the substrate baking apparatus 100 includes: a chamber 110, the interior of the chamber 110 forms a space for accommodating the substrate 10; and a top cover 120, located on the chamber 110 and covering the chamber 110, wherein the top cover 120 A heating element 130 is provided in it. will refe...

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Abstract

An embodiment of the invention provides a substrate baking device. The substrate baking device comprises a cavity, wherein the cavity is internally provided with a space for accommodating a substrate; and a top cap, which is arranged on the cavity and covers the cavity, wherein the top cap is provided with a heating member. The substrate baking device can prevent a gaseous solvent in the cavity from being attached to and accumulated on the top cap of the cavity, and thus qualified rate of the substrate product is improved.

Description

technical field [0001] Exemplary embodiments of the inventive concept relate to a baking apparatus, and more particularly, to a substrate baking apparatus. Background technique [0002] In the manufacturing process of a liquid crystal display, a CF (Color Filter, color filter) process is used to form a substrate including a color filter. Generally, the CF process includes steps such as substrate input, cleaning and drying, photoresist coating, vacuum drying, pre-baking, exposure, and development. Pre-baking refers to baking the substrate coated with photoresist at a certain temperature for a period of time, so that the solvent remaining in the photoresist is volatilized, and the adhesion between the photoresist and the surface of the substrate is increased, thereby It is beneficial to carry out the subsequent exposure process and development process smoothly. [0003] A substrate baking device is a device for performing pre-baking in the related art. The substrate is dire...

Claims

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Application Information

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IPC IPC(8): H01L21/67G02F1/13
CPCG02F1/1303H01L21/67103
Inventor 方仲贤熊燕军徐涛
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD