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Accurate gas feeder applied to diamond film coating equipment

A technology of diamond film and air intake device, which is applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problem that the precise air intake device cannot be accurately controlled, and achieves small error, reasonable structure, and reliable lifting Effect

Inactive Publication Date: 2016-01-20
浏阳市联创机械设备制造厂
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The precise air intake device used in the existing diamond film coating equipment has the disadvantage that it cannot be accurately controlled

Method used

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  • Accurate gas feeder applied to diamond film coating equipment

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Embodiment Construction

[0011] The present invention will be further described below in conjunction with the accompanying drawings.

[0012] Such as figure 1 As shown, a precise air intake device for diamond film coating equipment, which includes a stepping motor 2, a large pulley 1, a small pulley 4, a transmission belt 3, a ball screw 5, a screw nut 6, and a fixing seat 8 , slider 7, connecting rod 9, injection head 10. The output of the stepping motor 2 is equipped with a large pulley 1, the large pulley 1 is connected with the small pulley 4 through the transmission belt 3, the small pulley 4 is fixedly installed on the upper end of the ball screw 5, and the ball screw 5 is equipped with a screw nut 6, The screw nut 6 is fixed on the slide block 7, and the slide block 7 is enclosed within the outside of the holder 8, and can slide up and down. The lower end of the slider 7 is fixedly equipped with a connecting rod 9, and the lower end of the connecting rod 9 is equipped with an injection head 1...

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PUM

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Abstract

The invention relates to an accurate gas feeder applied to diamond film coating equipment. The accurate gas feeder comprises a stepping motor, a driving belt, a ball screw, a screw nut, a fixed base, a sliding block, a connection rod and an injection head, wherein the motor is used for driving the ball screw through the driving belt; the screw nut is mounted on the ball screw and is fixed on the sliding block; the sliding block is connected with the fixed base in a sliding manner; the connection rod and the injection head are mounted at the upper end of the sliding block. The accurate gas feeder is simple in structure, accurate to locate and convenient to adjust, and is capable of accurately controlling gases such as argon, hydrogen and methane to be injected into a reaction chamber of the equipment according to the set volumes.

Description

technical field [0001] The invention relates to diamond film coating equipment, in particular to a precise air intake device for diamond film coating equipment. Background technique [0002] The diamond film has excellent heat dissipation properties, and its thermal conductivity can reach 2000W / (m.k), which can well solve the heat dissipation problem of tools with high frictional heat generated by high-speed motion; at the same time, the diamond film has a particularly high hardness, and the diamond film The microhardness of the film can reach 9000-10000HV, which can overcome huge resistance and extrusion stress. Therefore, many workpieces or tools that require wear resistance, good heat dissipation, and good rigidity all adopt the method of coating the surface with a diamond film. [0003] In the process of coating the diamond film on the surface of the workpiece, it is necessary to draw a vacuum and fill the reaction chamber of the equipment with gases such as argon, hydr...

Claims

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Application Information

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IPC IPC(8): C23C16/455C23C16/27
Inventor 邓日希
Owner 浏阳市联创机械设备制造厂