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Solid Particle Recovering and Removing Apparatus, Liquid Managing Apparatus and Etching Solution Managing Apparatus

A solid particle and liquid technology, which is applied in the field of solid particle recovery and removal devices, can solve the problems of time-consuming processing, large sedimentation tanks, and a large amount of time

Inactive Publication Date: 2016-01-27
HIRAMA LAB
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] However, in the method and apparatus described in Patent Document 1, the filter is clogged with solid particles, so it is necessary to replace or backwash the filter at predetermined intervals.
In addition, in the case of circulating the liquid, it is necessary to stop the circulation every time it is replaced or backwashed, and there is a problem that it takes time to process
In addition, since the filter may be clogged, a separate device may be required for pressurization
In the case of the sedimentation and separation of solid particles mixed in the liquid described in Patent Document 2, there are problems in terms of installation space and processing time as follows: a large sedimentation tank needs to be set, and a large amount of sedimentation is required for sedimentation and separation. time

Method used

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  • Solid Particle Recovering and Removing Apparatus, Liquid Managing Apparatus and Etching Solution Managing Apparatus
  • Solid Particle Recovering and Removing Apparatus, Liquid Managing Apparatus and Etching Solution Managing Apparatus
  • Solid Particle Recovering and Removing Apparatus, Liquid Managing Apparatus and Etching Solution Managing Apparatus

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no. 1 approach

[0040] figure 1 It is a schematic diagram of the solid particle recovery and removal apparatus 50 of the first embodiment. like figure 1 As shown, the solid particle recovery and removal device 50 mainly includes a housing 35 inclined at a predetermined angle θ with respect to the horizontal, a conveying screw 36, a motor 37 for rotating the conveying screw 36, a solid particle recovery container 38, and a shell for A connecting pipe (a solid particle discharge pipe) 39 that discharges the solid particles in the body 35 to the solid particle recovery container 38 . The housing 35 is formed in a cylindrical shape, and a conveying screw 36 is provided in the housing.

[0041] The conveying screw 36 is provided along the longitudinal direction in the casing 35 , and a screw blade 36 b is attached in a helical shape around a central shaft 36 a rotated by a motor 37 . The conveying screw 36 is provided in the casing 35 so as to be close to the inner wall of the casing 35 . By r...

no. 2 approach

[0049] figure 2 It is a schematic diagram of the solid particle recovery and removal device 150 of the second embodiment. The solid particle recovery and removal apparatus 150 of the second embodiment is different from the first embodiment in that a heat exchange unit (cooling mechanism) 42 for cooling the liquid in the casing 35 is provided on the outer peripheral surface of the casing 35 .

[0050] The heat exchanging unit 42 includes, for example, a thermoelectric micromodule constituted by a Peltier element or the like, and a heat exchange sleeve for absorbing heat of the thermoelectric micromodule, which is cooled by cooling water for discharging heat. It is preferable that the outer side of the housing 35 is covered with a heat insulating material (not shown) in order to achieve heat insulation from an external heat source. It should be noted that the heat exchange unit 42 may be a refrigerant jacket that circulates the refrigerant to surround the outer surface of the ...

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PUM

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Abstract

The invention provides a solid particle recovering and removing apparatus which can save the space and can shorten processing time, a liquid managing apparatus which is provided with the solid particle recovering and removing apparatus, and an etching solution managing apparatus which is provided with the solid particle recovering and removing apparatus. The solid particle recovering and removing apparatus is provided with a housing (35) which is cylindrical; a central shaft (36a) which is disposed in the housing (35); screw vanes (36b) which are disposed in a spiral shape nearby the central shaft (36a) in a manner of approaching an inner wall of the housing (35); a flow inlet which supplies liquid containing solid particles; a discharge port which discharges the liquid containing solid particles; a solid particle discharge pipe which enables the solid particles to be discharged from the housing (35) and is arranged to be higher than the flow inlet and the discharge port. The housing (35) is arranged at a specified angle, and a motor (37) enables the screw vanes (36b) to rotate, thereby achieving the conveying of the solid particles in the liquid to the solid particle discharge pipe from the liquid in the housing (35) for discharge.

Description

technical field [0001] The present invention relates to a solid particle recovery and removal device, a liquid management device and an etching liquid management device, in particular to a solid particle recovery and removal device that separates solid particles mixed in liquid from the liquid and removes them from the liquid. A solid particle recovery and removal device that precipitates and recovers and removes solid particles, a liquid management device and an etching liquid management device equipped with the above-mentioned solid particle recovery and removal device. Background technique [0002] Liquids are used in various industries. However, sometimes solid particles are mixed in the liquids and the devices and measuring instruments through which the liquids flow are damaged. In addition, by implementing cooling, heating concentration, adding additives, etc., solids are actively precipitated, thereby improving the purity of liquids, concentrating liquids, or separati...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23F1/46C23F1/08
Inventor 中川俊元白井浩之
Owner HIRAMA LAB
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