Piezoelectric pump

Abstract

The invention relates to a piezoelectric pump. A piezoelectric vibrator is used as a driving element; the piezoelectric pump comprises an integrated cavity valve part; the piezoelectric vibrator is arranged at one side of the integrated cavity valve part; a cavity sunken groove is formed in a position, corresponding to the piezoelectric vibrator, on the integrated cavity valve part; after being mounted, the piezoelectric vibrator forms a sealing cavity, namely a pump cavity together with the cavity sunken groove; a diversion trench is arranged at the bottom of the cavity sunken groove; a cavity inlet and a cavity outlet are formed in the bottom of the diversion trench; the piezoelectric vibrator generates forward and backward bending deformation under the action of an alternating voltage to enable the volume of a cavity to be changed; when the volume of the pump cavity is increased, the pressure is reduced, an opening of an inlet valve is opened, an opening of an outlet valve is closed, and a fluid flows from the inlet to the cavity; and when the volume of the pump cavity is reduced, the pressure is increased, the opening of the inlet valve is closed, and the opening of the outlet valve is opened, and the fluid flows out from the outlet to form pumping capacity. The piezoelectric pump has the advantage of simplicity in assembly.

Description

technical field [0001] The invention belongs to the field of fluid delivery, and in particular relates to a piezoelectric pump device. Background technique [0002] Piezoelectric pump is a micro-sized volumetric pump driven by piezoelectric vibrators. It has the advantages of simple structure for mass production, small size for miniaturization, digital control and long life. It is widely used in instrumentation, testing equipment and mechanical electronics. It has broad application prospects. Existing piezoelectric pumps include several typical forms of sheet bending direct drive, stack push diaphragm drive and resonance amplification drive. The above types of pumps include valve pumps and valveless pumps according to the types of valves. The output performance of the pump is obviously stronger than that of the valveless pump. Due to the small change in the cavity volume of the piezoelectric pump, the cut-off requirements for the check valve are higher than those of the tr...

AI Technical Summary

Problems solved by technology

[0003] In order to solve the inconvenience of large-scale production caused by the complex valve assembly and high assembly precision requirements in the process of miniaturization of piezoelectric pumps, a piezoelectric pump is proposed, which consists of two parts, namely, a piezoelectric vibrator and a piezoelectric vibrator. One-piece cavity valve parts, in which the valve and the cavity are the same part, without assembly process, it has the characteristics of simple assembly and low assembly accuracy requirements in the miniaturization process, and is suitable for large-scale industrial production

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