A six-degree-of-freedom displacement measurement method based on magnetic field
A technology of displacement measurement and degrees of freedom, applied in the direction of measuring devices, electromagnetic means, instruments, etc., can solve the problems of unfavorable real-time performance and reliability, small measuring range, and strict installation requirements of the measurement system, and achieve good real-time performance and high precision. , the effect of a large measurement range
Active Publication Date: 2018-10-30
TSINGHUA UNIV
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At present, high-precision multi-degree-of-freedom displacement measurement is represented by capacitive sensors, eddy current sensors, and laser interferometers. These methods have high measurement accuracy, but the measurement range is generally small and the installation requirements are relatively strict.
[0003] In the field of precision measurement, especially multi-degree-of-freedom displacement measurement, there is generally a complex nonlinear relationship between spatial coordinates and sensor output. Therefore, in order to achieve three-degree-of-freedom or even six-degree-of-freedom displacement measurement, it is necessary to arrange a variety of different types of sensors. Linearization of each degree of freedom to achieve the purpose of solving the displacement, which is very detrimental to the real-time and reliability of the measurement system in the industrial field
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[0036] Taking the spatial magnetic field constructed by a rectangular permanent magnet as an example, the six-degree-of-freedom displacement measurement method based on magnetic field information in the present invention will be described in conjunction with the drawings and embodiments.
[0037] 1) Fix rectangular permanent magnets and 8 magnetic sensors sensitive to magnetic field information on two moving objects to form a sensor array. The arrangement of the sensors is as follows: figure 2 ;
[0038] 2) if figure 1 A fixed coordinate system OXYZ is established on a rectangular permanent magnet whose length, width and height are 50mm, 50mm, and 5mm respectively, and its XY plane coincides with the upper surface of the permanent magnet. Mathematical relationship: B(x,y,z)=B x (x,y,z)i+B y (x,y,z)j+B z (x,y,z)k, where B x ,B y ,B z are the components of B in the X-axis, Y-axis and Z-axis directions respectively, and i, j, k are the unit vectors of the X-axis, Y-axis a...
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The invention relates to a six-freedom displacement measurement method based on a magnetic field. A specially distributed magnetic field is constructed in a space by use of reasonably distributed permanent magnets, magnetic sensors are arranged in the scope of a generated magnetic field space for receiving magnetic induction intensity signals, the magnetic sensors are fixedly arranged on moving objects so as to move along with the objects, a corresponding mathematic model solution position equation is established by use of a relation between magnetic induction intensity and space position coordinates, and thus high-precision displacement measurement is realized. The method provided by the invention can solve the problem of incapability of three-freedom measurement and higher-freedom measurement in the industrial field due to limited installation positions or measurement means.
Description
technical field [0001] The invention relates to a six-degree-of-freedom displacement measurement method, especially suitable for six-degree-of-freedom displacement detection based on magnetic field information. Background technique [0002] The measurement system is a key link in the precision electromechanical system. The multi-degree-of-freedom precision displacement measurement system is widely used in machine tools, aerospace, automobiles and other fields. At this stage, high-precision multi-degree-of-freedom displacement measurement is represented by capacitive sensors, eddy current sensors, and laser interferometers. These methods have high measurement accuracy, but the measurement range is generally small and the installation requirements are relatively strict. [0003] In the field of precision measurement, especially multi-degree-of-freedom displacement measurement, there is generally a complex nonlinear relationship between spatial coordinates and sensor output. T...
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IPC IPC(8): G01B7/02
CPCG01B7/02
Inventor 朱煜胡金春尹文生季钇澎张鸣杨开明胡楚雄成荣
Owner TSINGHUA UNIV