Determination method for distributed MEMS (micro-electromechanical systems) phase shifter capacitance bridge height tolerance based on electromechanical coupling

Abstract

The invention discloses a determination method for distributed MEMS (micro-electromechanical systems) phase shifter capacitance bridge height tolerance based on electromechanical coupling. The determination method comprises the steps of 1) determining structural parameters, material attribute and electromechanical working parameters of the distributed MEMS phase shifter; 2) determining equivalent circuit parameters of the phase shifter; 3) determining a digit k of the phase shifter; 4) determining a standard capacitance bridge height of the phase shifter; 5) providing offset of initial capacitance bridge; 6) calculating phase shifting amount generated by single capacitance bridge by using an electromechanical coupling model of the single capacitance bridge; 7) calculating phase shifting amount of the phase shifter; 8) calculating deviation value of the phase shifter; and 9) judging whether the deviation value of the phase shifter satisfies the tolerance requirement or not under the condition of the capacitance bridge height. The influences on the phase shifting amount of the phase shifter by the capacitance bridge structural parameters are directly obtained by using the electromechanical coupling models between the phase shifter capacitance bridge structural parameters and the phase shifting amount, so that reasonable capacitance bridge structural tolerance precision can be rapidly provided, the processing cost and processing difficulty are lowered, and the research and development period is shortened.

Description

technical field [0001] The invention belongs to the technical field of microwave devices, in particular to a method for determining the height tolerance of a capacitor bridge of a distributed MEMS phase shifter based on electromechanical coupling. The invention relates to a method for distributing structural design and manufacturing tolerances of a distributed MEMS phase shifter, which can be used to guide the rapid determination of the MEMS bridge height tolerance of the distributed MEMS phase shifter and the evaluation of the structural scheme. Background technique [0002] With the development of RFMEMS (Micro-electromechanical Systems) technology, MEMS phase shifters have been widely used in various radar and satellite navigation fields due to their advantages of miniaturization, low loss, low cost, and good performance. Among them, the distributed MEMS phase shifter is easier to manufacture, smaller in size and better in performance than other forms of MEMS phase shifte...

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Problems solved by technology

[0005] Based on the above problems, the present invention utilizes the electromechanical coupling model between the structure parameter capacitance bridge height of the distributed MEMS phase shifter and the phase shift amount, can realize the coupling analysis of the structure parameter and the electric parameter

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