MEMS diamond multi-ring gyroscope and processing method thereof
A diamond and gyroscope technology, applied in the field of MEMS inertial sensors, can solve the problems of difficult quartz material processing, difficulty in mass production, low quality factor, etc., and achieve the effect of realizing mass production, improving quality factor, and improving axis symmetry
Inactive Publication Date: 2016-04-13
SHANGHAI XINYUE METER FACTORY
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Problems solved by technology
[0002] Existing MEMS gyroscopes mainly adopt a quartz tuning fork structure, which has poor symmetry, low quality factor, and cross-coupling between input and output axes, making it difficult to improve accuracy
Moreover, the processing of quartz materials is difficult, and there are certain difficulties in mass production
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[0023] The present invention will be further elaborated below by describing a preferred specific embodiment in detail in conjunction with the accompanying drawings.
[0024] Such as figure 1 As shown, a MEMS diamond multi-ring gyroscope includes: a diamond multi-ring resonator, which includes several layers of diamond rings that are sequentially distributed from the inside to the outside and are concentric; diamond side electrodes, which are distributed on the diamond multi-ring resonator. On the outside, a capacitive gap of about 10m is reserved between the diamond multi-ring resonator; the support structure includes: a central support column, the central support column is located at the center of the diamond multi-ring resonator, and is fixed to the base; Several spring support beams 9 are connected between the innermost diamond ring and the central support column 10, so that the diamond multi-ring resonator is suspended.
[0025] The above-mentioned diamond multi-ring reso...
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The invention discloses a MEMS diamond multi-ring gyroscope and a processing method thereof. The MEMS diamond multi-ring gyroscope comprises a diamond multi-ring harmonic oscillator, the diamond multi-ring harmonic oscillator comprises several layers of diamond circular rings which are homocentrically and orderly distributed from inside to outside, the MEMS diamond multi-ring gyroscope also comprises a diamond side electrode which are distributed on the outer side of the diamond multi-ring harmonic oscillator, the MEMS diamond multi-ring gyroscope also comprises a support structure which comprises a central support column located in the circle center of the diamond multi-ring harmonic oscillator and fixed to a base, and the MEMS diamond multi-ring gyroscope also comprises several spring support beams which connect the diamond circular ring at the innermost side and the central support column so that the diamond multi-ring harmonic oscillator is suspended. The MEMS diamond multi-ring gyroscope has the advantages of small volume, light weight, low power dissipation, high quality factor, good stability and batch production and prevents external environment vibration-caused influence on the device.
Description
technical field [0001] The invention relates to a MEMS inertial sensor, in particular to a MEMS diamond multi-ring gyroscope based on the resonance principle of an axisymmetric structure. Background technique [0002] Existing MEMS gyroscopes mainly adopt a quartz tuning fork structure, which has poor symmetry, low quality factor, and cross-coupling between input and output axes, making it difficult to improve accuracy. Moreover, the processing of quartz materials is difficult, and there are certain difficulties in mass production. Contents of the invention [0003] Aiming at the deficiencies of the prior art, the main problem to be solved by the present invention is to provide a MEMS gyroscope with high symmetry, high quality factor, high precision and easy batch production. The gyroscope is based on the resonance principle of the axisymmetric structure, which improves the axisymmetric nature of the device and reduces frequency splitting; at the same time, diamond materi...
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IPC IPC(8): G01C19/5684
CPCG01C19/5684
Inventor 成宇翔赵万良李绍良陈筠蔡雄
Owner SHANGHAI XINYUE METER FACTORY