Probe station image positioning device and vision alignment method
An image positioning and probe station technology, which is applied in electrical components, circuits, semiconductor/solid-state device testing/measurement, etc., can solve the problems of low efficiency and low needle-to-needle precision, achieve high efficiency and improve yield , the effect of improving the accuracy
Active Publication Date: 2016-04-20
HANGZHOU CHANGCHUAN TECH CO LTD
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Problems solved by technology
[0005] The purpose of the present invention is to overcome the shortcomings of low needle alignment accuracy and low efficiency of the probe station in the prior art, and provide a probe station image positioning device and visual alignment method with high needle alignment accuracy and high efficiency
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[0069] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.
[0070] Such as figure 1 The illustrated embodiment is a probe station image positioning device, including a base 1, an XY platform 2 disposed on the base, a first camera bracket 3 and a support frame 4; the first camera bracket is provided with a first camera 5. The XY platform is equipped with a slide table 6 and a second camera support 7. The support frame is provided with a probe card 8 and a horizontally telescopic cylinder 9. The end of the telescopic rod of the cylinder is connected with the calibration block 10. The slide table A wafer 11 is provided on the wafer, and 25,000 chips to be detected are arranged on the wafer, and each detection chip is provided with 16 pads, and a second camera 12 is arranged on the second camera bracket, and the lower surface of the calibration block is located on the second camera Above the upper surface,...
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Abstract
The invention discloses a probe station image positioning device and a vision alignment method. The device comprises a base, and an XY platform, a support frame and a first camera are arranged on the base; a slide holder and a second camera are arranged on the XY platform, a probe card and an air cylinder with horizontal scalability are arranged on the support frame, a telescopic rod end of the air cylinder is connected with a calibration block, a wafer is arranged on the slide holder, m detected chips are arranged on the wafer, a bonding pad is arranged on each detected chip, the lower surface of the calibration block is arranged on the above of the second camera, the upper surface of the calibration block is arranged below the first camera, m probes corresponding to the bonding pads are arranged on the probe card, and the wafer is arranged below the first camera. According to the invention, the error of moving parts of the probe station can be compensated according to the probe mark position, and the precision of the device is improved; the probe aligning operation can be independently completed, the probe aligning success rate is high, the efficient is high, and reliable bases are provided for accurately detecting chips.
Description
technical field [0001] The invention relates to the technical field of integrated circuit testing equipment, in particular to a probe station image positioning device and a visual alignment method with high needle alignment accuracy and high efficiency. Background technique [0002] Wafer testing is an important process in integrated circuit manufacturing. Accurate testing can eliminate defective products in time, reduce waste of packaging and testing costs, and improve product yield. The probe station is a device used for wafer testing, which can automatically complete the electrical performance test of integrated circuits after being connected to the testing machine. The main function of the probe station is to achieve precise alignment between the wafer pad and the tip of the probe card, that is, needle alignment. The accuracy of the needle will have an important impact on the test results. [0003] Today, vision systems have been widely used in automated production lin...
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Login to View More IPC IPC(8): H01L21/66
CPCH01L22/30
Inventor 郭剑飞方兆文赵轶胡东辉姚建强
Owner HANGZHOU CHANGCHUAN TECH CO LTD