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An air curtain device

An air curtain and air pressure technology, which is applied in the direction of dry gas arrangement, electrical components, and cleaning methods using gas flow, etc., can solve problems affecting the isolation of air curtain devices, poor array substrates, and air pressure fluctuations at the air outlet 03, etc.

Active Publication Date: 2018-07-17
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In practical applications, the gas flow rate flowing into the air inlet 02 may suddenly increase, causing fluctuations in the air pressure of the air outlet 03, affecting the isolation effect of the air curtain device, and may even cause foreign matter to be ejected and cause problems such as failure of the array substrate.

Method used

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  • An air curtain device
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Embodiment Construction

[0030] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention.

[0031] In addition, the terms "first" and "second" are used for descriptive purposes only, and cannot be understood as indicating or implying relative importance or implicitly specifying the quantity of indicated technical features. Thus, a feature defined as "first" and "second" may explicitly or implicitly include one or more of these features. In the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0032] Embodiments of the present invention provide an air curtain device, such as figure 2 As shown, it includes: a pressure limiting module 11, and an air curtain main body 12 communicating with the pressure limiting...

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Abstract

Embodiments of the present invention provide an air curtain device, which relates to the field of display technology, can ensure the flow stability of the airflow output by the air curtain device, and improve the yield of array substrates. The air curtain device includes: a pressure limiting module, and an air curtain main body communicated with the pressure limiting module; The first air outlet of the chamber communicates with the main body of the air curtain; wherein, an air pressure linkage mechanism is provided in the pressure limiting chamber, and the air pressure linkage mechanism can change the first air outlet according to the change of the air pressure in the pressure limiting chamber. The cross-sectional area of ​​the air outlet is such that the pressure of the airflow flowing out of the first air outlet is within a preset range. The method can be applied in the manufacturing process of the thin film transistor array substrate.

Description

technical field [0001] The invention relates to the field of display technology, in particular to an air curtain device. Background technique [0002] In the wet stripping process of the semiconductor and thin film transistor array substrate manufacturing technology, the wet stripping chemical solution is generally used to remove the photoresist; the wet stripping process is a process after the etching process, which refers to the removal of the remaining photoresist on the glass substrate. Engraving. These photoresists can be removed by using a wet stripping solution, and then the glass substrate enters the deionized water area for cleaning. In order to remove the stripping liquid remaining on the glass substrate, an air curtain (Air Curtain) device is usually used to remove the stripping liquid remaining on the glass substrate, so as to avoid the influence of the remaining stripping liquid on the next process. [0003] Such as figure 1 Shown is a schematic structural vi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/67
CPCH01L21/67028H01L21/67034F26B21/004B08B5/02
Inventor 张春泽李伟于凯刘聪
Owner BOE TECH GRP CO LTD
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