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High-resolution temperature sensor based on built-in liquid capsule and fixed wavelength

A temperature sensor, fixed wavelength technology, applied in the field of temperature sensor, can solve the problem of low sensitivity or resolution, and achieve the effect of high resolution, compact structure and easy integration

Active Publication Date: 2016-05-25
深圳市上登太赫兹技术有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The sensitivity of the temperature sensor in the prior art is 70pm / °C or -0.65nm / °C. Although the temperature sensor is small in size, its sensitivity or resolution is not high

Method used

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  • High-resolution temperature sensor based on built-in liquid capsule and fixed wavelength
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  • High-resolution temperature sensor based on built-in liquid capsule and fixed wavelength

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Embodiment Construction

[0030] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0031] Such as figure 1 and 2 ( figure 2 The packaging medium above the structure is omitted in ), the present invention is based on a high-resolution temperature sensor with a built-in liquid bag and a fixed wavelength, which consists of a metal film 1, a built-in liquid bag 2, a metal block 3, a vertical waveguide 4, A horizontal waveguide 5, metal films 1, 6 (not etched metal films) and a signal light 200 propagating horizontally (surface plasmons formed on the surface of the waveguide); the signal light adopts a fixed wavelength; the liquid capsule 2 and the vertical The waveguide 4 is connected, the section of the liquid capsule 2 (temperature sensitive cavity) is a circular cavity, the radius is R, and its cross-sectional area is 502655nm 2 , with a thickness of 1 μm, the material in the liquid capsule 2 is a material with a low specific heat ...

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Abstract

The invention discloses a high-resolution temperature sensor based on a built-in liquid capsule and a fixed wavelength. The high-resolution temperature sensor comprises a liquid capsule, a metal block, a vertical waveguide, a horizontal waveguide, two metallic films and horizontally-spread signal light, wherein the liquid capsule and the vertical waveguide are connected, the metal block is arranged in the vertical waveguide and can move, the vertical waveguide and the horizontal waveguide are connected, and the signal light employs the fixed wavelength. The high-resolution temperature sensor has advantages of compact structure, small volume, high resolution and convenient integration.

Description

technical field [0001] The invention relates to a high-resolution, nanoscale temperature sensor, in particular to a high-sensitivity temperature sensor based on a built-in liquid capsule and single-wavelength laser detection. Background technique [0002] Temperature sensors are one of the most widely used sensors in practical applications. From cold and heat meters in our lives, thermometers to large instruments and temperature control equipment on integrated circuits, temperature sensors are everywhere. Although traditional temperature sensors, such as RTDs, platinum resistance thermometers, and bimetallic switches, have their own advantages, they are no longer suitable for miniature and high-precision products. The advantages of semiconductor temperature sensors such as high sensitivity or resolution, small size, low power consumption, and strong anti-interference ability make them widely used in semiconductor integrated circuits. [0003] Waveguides based on surface pla...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K11/00
CPCG01K11/006G01K11/00
Inventor 欧阳征标陈治良
Owner 深圳市上登太赫兹技术有限公司