Photonic crystal sensor structure and manufacturing method thereof
A photonic crystal and gas sensor technology, which is applied in the use of optical devices to transmit sensing components, instruments, optics, etc., and can solve problems such as diaphragm rupture and sensor inoperability.
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example 15
[0056]In Example 15, a pressure sensor can include a substrate, a light source, an optical detector, a plurality of optical cavities in the substrate, and processing circuitry, wherein the plurality of optical cavities are disposed between the light source and the optical detector In the optical path of the optical detector, processing circuitry is coupled to the optical detector and configured to process the optical signal received by the optical detector and determine pressure based on the received signal.
[0057] In Example 16, the pressure probe of Example 15 may further include a first pair of contact pads formed over the substrate and electrically coupled to the light source and a second pair of contact pads formed over the substrate and electrically coupled to the optical probe. plate.
[0058] In Example 17, the pressure detector of Example 15 or Example 16 may further include a photonic crystal structure that may include a plurality of optical cavities, wherein each ...
example 19
[0060] In Example 19, a method for forming a gas sensor may include forming a substrate, providing a light source, providing an optical detector, forming a plurality of optical cavities in the substrate or in a layer structure above the substrate, incorporating a plurality of an optical cavity is disposed in the optical path between the light source and the optical detector, and couples the gas detector to the optical detector and configures the gas detector to receive a signal representative of the optical signal received by the optical detector and Whether one or more predefined gases are present in the plurality of optical cavities is determined based on the received signals.
[0061] In Example 20, the method of Example 19, wherein the light source is configurable to generate a light source signal that is transmitted to the optical detector.
[0062] In Example 21, the method of Example 19 or Example 20 may further include forming a first pair of contact pads over the subs...
example 33
[0074] In Example 33, a method for forming a pressure sensor can include: forming a substrate; providing a light source; providing an optical detector; forming a plurality of optical cavities in the substrate; in an optical path between the optical detectors; and processing circuitry coupled to the optical detectors and configured to process optical signals received by the optical detectors and determine pressure based on the received signals.
[0075] In Example 34, the method of Example 33 may further include forming a first pair of contact pads over the substrate and electrically coupling the first pair of contact pads to the light source, and forming a second pair of contact pads over the substrate and electrically coupling the second pair of contact pads to an optical detector.
[0076] In Example 35, the method of Example 33 or Example 34, wherein the plurality of optical cavities can comprise a perforation in the substrate, wherein a series of sheet-like structures sepa...
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