Displacement measurement device based on optical interference
A technology of displacement measurement and optical interference, which can be used in measurement devices, optical devices, instruments, etc., and can solve the problems of long operation time, low precision and slow response.
Active Publication Date: 2018-07-06
MAANSHAN NIUZE TECH SERVICE
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Problems solved by technology
However, the existing displacement measurement systems generally have a high precision with a short range, and a large range with a low precision. The waveform matching is good, the precision is high, but the operation time is long and the response is slow, and the response is fast, but the precision is low, which cannot meet the needs of modern analysis.
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Embodiment 1
[0063] A displacement measurement device based on optical interference, comprising a laser emitting device 1, a first dichroic prism 2, a second dichroic prism 3, a third dichroic prism 9, a fourth dichroic prism 10, a first mirror 4, and a second mirror 5. The first right-angle reflecting prism group 7, the second right-angle reflecting prism group 8, the first photoelectric receiving device 6, the second photoelectric receiving device 12, and the driver 13;
[0064] A first dichroic prism 2 is provided on the laser light path emitted by the laser emitting device 1, and the dichroic optical path of the first dichroic prism 2 includes a dichroic optical path A and a dichroic optical path B; the second dichroic prism 3 is provided on the dichroic optical path A , The light splitting light path of the second light splitting prism 3 includes a light splitting light path C and a light splitting light path D; an optical resonant cavity is provided on the light splitting light path C, a...
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The invention relates to a displacement measuring device, especially to a displacement measuring device based on optical interference. at first light splitting prism is arranged in an optical path of a laser emitter, a second light splitting prism is arranged in a light splitting path A of the first light splitting prism, and an optical resonant cavity and a first photoelectric receiver are arranged in a light splitting path C of the second light splitting prism; a first rectangular reflection prism group and a second rectangular reflection prism group are arranged in a light splitting path D, one end of the first rectangular reflection prism group and one end of the second rectangular reflection prism group are connected with a first reflector and a second reflector respectively, the other ends of the first and second rectangular reflection prism groups are connected with a driver, reflection light of the first and second rectangular reflection prism groups returns to the second light splitting prism to form a light splitting path F, and a third light splitting prism is arranged in the light splitting path F; and a fourth light splitting prism is arranged in the light splitting path B, a rectangular reflector is arranged in a light splitting path E of the fourth light splitting prism, reflection light of the rectangular reflector is input to the third light splitting prism, and a second photoelectric receiver is arranged in a light splitting path G of the third light splitting prism. The displacement measuring device based on optical interference is high in measuring precision and large in measuring range, can cross the nm level and reach the m level, and can greatly shorten the response time of the system.
Description
Technical field [0001] The invention relates to a displacement measuring device, in particular to a displacement measuring device based on optical interference. Background technique [0002] In the analysis process of precision machinery design and material development, the collection of data such as displacement, vibration amplitude and frequency, deformation, and thermal expansion coefficient of materials becomes the key to the analysis. However, the existing displacement measurement systems generally have a high accuracy with a short range, and a large range with a low accuracy. The waveform matching is good and the accuracy is high, but the operation time is long and the response is slow, and the response is fast and the accuracy is low, which cannot meet the needs of modern analysis. Summary of the invention [0003] The technical problem to be solved by the present invention is to provide a displacement measuring device based on optical interference with high precision, larg...
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IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 林澎孙荣敏龙盛保胡江如韦家见陈水清唐丽媛李金丽林伟健龚英姬
Owner MAANSHAN NIUZE TECH SERVICE