A vacuum evaporation device and a method for preparing an organic electroluminescent device using it

A technology of luminescence and evaporation, which is applied in the direction of vacuum evaporation plating, electric solid devices, electrical components, etc., can solve the problems of long time and high cost of evaporation, and achieve shortened time required for device preparation and high flatness , The effect of facilitating large-scale industrial manufacturing

Active Publication Date: 2018-05-01
SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Technical problem to be solved: Aiming at the disadvantages of high cost of existing vacuum evaporation equipment and long time required for evaporation, the present invention provides a vacuum evaporation Device and method for preparing organic electroluminescent device using same

Method used

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  • A vacuum evaporation device and a method for preparing an organic electroluminescent device using it
  • A vacuum evaporation device and a method for preparing an organic electroluminescent device using it
  • A vacuum evaporation device and a method for preparing an organic electroluminescent device using it

Examples

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Effect test

Embodiment 1

[0032] A method for preparing an organic electroluminescent device using a vacuum evaporation device, the method comprising the steps of:

[0033] Step 1: The ITO glass substrate is ultrasonically cleaned with acetone, ethanol and distilled water, then rinsed with distilled water and dried, then subjected to ozone treatment, and then spin-coated or scraped or ink-jet printed a layer of PEDOT on the ITO glass substrate : PSS, and then annealed, the annealing temperature is 160 ℃, and the annealing time is 15 min;

[0034] Step 2: Dissolve TAPC in chloroform and let it stand for 1 hour to obtain solution A, wherein the concentration of solution A is 30 mg / mL;

[0035] The third step: ultrasonically clean the silicon substrate I with acetone, ethanol and distilled water successively, then rinse with distilled water and dry, and then apply solution A evenly on the silicon substrate by spin coating, scraping coating or inkjet printing Ⅰ surface, forming a thin film with a thicknes...

Embodiment 2

[0042] In Example 2, the method for preparing an organic electroluminescent device using a vacuum evaporation device is the same as that in Example 1, the difference being that the vacuum pump 3 is used to pump the pressure in the vacuum evaporation cover 1 to 0.1 in the fourth step and the seventh step. Pa.

Embodiment 3

[0044] In Example 3, the method for preparing an organic electroluminescent device using a vacuum evaporation device is the same as that in Example 1, the difference being that in the fourth step and the seventh step, a vacuum pump 3 is used to pump the pressure in the vacuum evaporation cover 1 to 1 Pa. .

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Abstract

The invention provides a vacuum evaporation device and a method for preparing an organic electroluminescent device by using the same. The vacuum evaporation device is composed of a vacuum evaporation cover, a tantalum evaporation support and a vacuum pump; the tantalum evaporation support consists of a base and Composed of two base support plates, the base support plate is vertically arranged above the base, and base card slots are respectively arranged above the two base support plates, and the left and right sides of the base are respectively connected to the positive and negative poles of the power supply to form a current loop; The base and the vacuum evaporation cover are placed in parallel, separated by wooden sticks in the middle, and the vacuum pump is connected with the inner space of the vacuum evaporation cover through a vacuum tube. The vacuum evaporation device provided by the present invention enables the preparation of organic electroluminescent devices to be completed under relatively low pressure conditions, without the need to use expensive vacuum evaporation equipment, and the required equipment is greatly reduced in cost compared with the traditional process. .

Description

technical field [0001] The invention belongs to the technical field of vapor deposition devices, and in particular relates to a vacuum vapor deposition device and a method for preparing organic electroluminescence devices using the same. Background technique [0002] In the preparation process of organic semiconductor devices, the method of vacuum evaporation is widely used at present. The high cost of vacuum equipment in this method is one of the important factors leading to the high price of organic semiconductor devices. Moreover, the time required for vacuuming the vacuum evaporation is very long, resulting in a very long time for the preparation of the organic electroluminescent device. However, as the productization of organic semiconductor devices develops faster and faster, the problem of production cost becomes more severe. In order to reduce production costs, the process of preparing organic semiconductor devices by solution method came into being. But at the sam...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L51/00H01L51/56C23C14/50
CPCC23C14/50H10K71/164H10K71/00
Inventor 廖良生王照奎王波
Owner SHANGHAI SHINSEE OPTOELECTRONICS TECH CO LTD
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