Multi-axis parallelism detection device with large-scale diameter expansion and self-test function
A parallel detection and wide-ranging technology, applied in the direction of measuring devices, optical devices, testing optical performance, etc., can solve the problems of inability to conduct field tests, large influence of its own caliber, poor accuracy, etc., to achieve small space occupation and timely calibration , the effect of reasonable layout
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[0019] The present invention will be described in further detail below in conjunction with the accompanying drawings.
[0020] Such as figure 1 As shown, the multi-axis parallelism detection device with large-scale diameter expansion and self-checking function is composed of a collimator assembly 1, a mirror assembly 2, a small-range diameter expansion assembly 4, a large-scale diameter expansion assembly 3, and a self-calibration The component 5, the fine-tuning platform 6 and the tripod 7 are composed. Wherein, the fine-tuning platform 6 is arranged on the tripod 7, which can be rotated, pitched, and translated to realize the fine-tuning of the incoming light beam; wherein, the reflector assembly 2 is fixed on the fine-tuning platform 6; the collimator assembly 1 is arranged on the fine-tuning platform 6 and placed inside the tripod 7 to save space; wherein, the small-range expansion assembly 4 rotates around the mirror assembly 2 through the first rotating pair 9; the larg...
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