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Manufacturing method of perpendicular magnetic recording medium
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A technology of perpendicular magnetic recording and manufacturing method, which is applied in the directions of magnetic recording, data recording, manufacturing base layer, etc., and can solve problems not mentioned
Active Publication Date: 2018-05-08
FUJI ELECTRIC CO LTD
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However, in Patent Document 2, there is no mention of using B in combination with ordered alloys 4 C
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Embodiment 1～3、 comparative example 1～2
[0135] About Examples 1, 2, 3, and Comparative Examples 1-2, each magnetic recording medium was obtained by laminating|stacking according to the following layer structure A.
[0140] In the layer structure A, an MgO substrate (manufactured by Tateho Chemical Industry Co., Ltd.) is used as a non-magnetic substrate. On this substrate, the first magnetic recording layer (FePt-C layer) is directly formed into a film, and then the second 2 The magnetic recording layer (FePt-B-C layer) is formed into a film, and the non-magnetic substrate is introduced into the sputtering device and is not opened to the atmosphere. Through the inline (Inline) type film forming device, according to the above-mentioned layer structure A Each layer in the above-mentioned layer structure A was formed into a film in the order shown. ...
Embodiment 4
[0143] (Example 4, Comparative Example 3)
[0144] Regarding Example 4 and Comparative Example 3, each magnetic recording medium was obtained by laminating according to the following layer structure B.
[0153] In the layer structure B, a glass substrate [chemically strengthened glass substrate (N-10 glass substrate produced by HOYA Co., Ltd.)] was used as a non-magnetic substrate, and a Ta adhesive layer, a second MgO underlayer, a Cr underlayer, After the MgO seed crystal layer, the first magnetic recording layer (FePt—C layer) and the second magnetic recording layer (FePt—B—C layer) are formed into films.
[0154] The non-magnetic substrate is introduc...
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Abstract
Provided is a method of manufacturing a perpendicular magnetic recording medium that includes a magnetic recording layer having a desired film thickness while maintaining high magnetic anisotropy, and that has more uniform magnetic properties. The manufacturing method of the perpendicular magnetic recording medium includes: a step of preparing a non-magnetic substrate; a step of laminating a magnetic recording layer on the non-magnetic substrate; process, wherein the process (B) includes at least the process of forming a first magnetic recording layer and the process of forming a second magnetic recording layer on the first magnetic recording layer, the first magnetic recording layer has a first The granular structure of the magnetic crystal grains and the first non-magnetic grain boundaries made of carbon surrounding it, and the second magnetic recording layer has the second magnetic crystal grains made of an ordered alloy and the grains made of boron and carbon surrounding it. The granular structure of the second nonmagnetic grain boundary made of nonmagnetic material.
Description
technical field [0001] The invention which disclosed some structural examples in this specification relates to the manufacturing method of a perpendicular magnetic recording medium. Background technique [0002] In recent years, the demand for higher density of magnetic recording has become prominent. As a technique for achieving high density of magnetic recording, a perpendicular magnetic recording method is adopted. A perpendicular magnetic recording medium based on this method includes at least a nonmagnetic substrate and a magnetic recording layer containing a hard magnetic material. The perpendicular magnetic recording medium may optionally include, in addition to the above-mentioned elements, a soft magnetic backing layer formed of a soft magnetic material and responsible for concentrating the magnetic flux generated by the magnetic head on the magnetic recording layer, and a soft magnetic backing layer for making the magnetic recording layer An underlayer for orient...
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