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A kind of preparation method of fecral coating on molybdenum alloy substrate

A technology of molybdenum alloy and substrate, which is applied in the field of preparation of FeCrAl coating on molybdenum alloy substrate, can solve the problems of poor coating performance, weak bonding force between coating and substrate, etc., and achieve the effect of compact structure, improved oxidation resistance and large output

Active Publication Date: 2018-08-03
XIAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of this invention is to provide a kind of preparation method of FeCrAl coating on the molybdenum alloy substrate, adopt multi-target magnetron sputtering ion plating technology to prepare FeCrAl coating on the molybdenum alloy substrate, solve the substrate oxidation, coating and substrate existing in the existing method The problem of weak bonding force and poor coating performance

Method used

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  • A kind of preparation method of fecral coating on molybdenum alloy substrate
  • A kind of preparation method of fecral coating on molybdenum alloy substrate
  • A kind of preparation method of fecral coating on molybdenum alloy substrate

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Embodiment 1

[0029] After cleaning and drying the pure molybdenum substrate, put it into the vacuum chamber of the multi-target magnetron sputtering ion plating equipment. The targets are 2 316l stainless steel targets, 2 pure chromium metal targets, and 1 pure aluminum metal target. Evacuate the vacuum chamber to 9×10 -5 After Torr, argon gas is introduced, and the flow rate is 15 sccm. Perform ion bombardment cleaning for 20 minutes: adjust the negative bias to -400V, turn on the four target currents at the same time, I 316l 0.3A, I Cr 0.8A, I Al 0.3A; then deposit 20min of chromium primer: adjust the negative bias to -120V, adjust the four target currents, I 316l 0.3A, I Cr 1.0A, I Al 0.3A; deposit FeCrAl coating for 150min: adjust negative bias to -40V, adjust four target currents, I 316l for 2A, I Cr 0.5A, I Al 0.6A.

[0030] The composition of the FeCrAl coating obtained by this process is: Fe-24.4Cr-3.7Al, the thickness is 11.4μm, the bonding force is 55MPa, and the hardnes...

Embodiment 2

[0032] After cleaning and drying the molybdenum-zirconium alloy substrate, put it into the vacuum chamber of the multi-target magnetron sputtering ion plating equipment. The targets are two 316l stainless steel targets, one pure chromium metal target, and one pure aluminum metal target. Evacuate the vacuum chamber to 1 x 10 -5 After Torr, argon gas is introduced, and the flow rate is 24 sccm. Perform ion bombardment cleaning for 12 minutes: adjust the negative bias voltage to -480V, and turn on the four target currents at the same time, I 316l 0.5A, I Cr 0.3A, I Al 0.5A; then deposit 5min of chromium primer: adjust the negative bias to -120V, adjust the four target currents, I 316l 0.8A, I Cr for 2A, I Al 0.8A; deposit FeCrAl coating for 30min: adjust negative bias to -90V, adjust four target currents, I 316l 5A, I Cr for 3A, I Al for 3A.

[0033]The composition of the FeCrAl coating obtained by this process is: Fe-29.4Cr-6.4Al, the thickness is 3.7μm, the bonding for...

Embodiment 3

[0035] After cleaning and drying the molybdenum-yttrium alloy substrate, put it into the vacuum chamber of the multi-target magnetron sputtering ion plating equipment. The targets are two 316l stainless steel targets, one pure chromium metal target, and one pure aluminum metal target. Evacuate the vacuum chamber to 4 x 10 -5 After Torr, argon gas is introduced, and the flow rate is 28 sccm. Perform ion bombardment cleaning for 30 minutes: adjust the negative bias voltage to -320V, turn on the four target currents at the same time, I 316l 0.8A, I Cr 0.5A, I Al 0.3A; then deposit 8min of chromium primer: adjust the negative bias to -150V, adjust the four target currents, I 316l 0.3A, I Cr for 3A, I Al 0.3A; deposit 380min of FeCrAl coating: adjust the negative bias to -60V, adjust the four target currents, I 316l 5A, I Cr 1.4A, I Al for 2A.

[0036] The composition of the FeCrAl coating obtained by this process is: Fe-25Cr-4.2Al, the thickness is 49μm, the bonding force...

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Abstract

The invention discloses a preparation method of a FeCrAl cladding layer on a molybdenum alloy matrix. The molybdenum alloy matrix is cleaned and dried and then placed into a vacuum chamber of magnetron sputtering ion plating equipment, a target material at least comprises a 3161 stainless steel target, a pure chromium metal target and a pure aluminum metal target, the vacuum chamber is vaccumized, then, ion bombardment cleaning is performed on the molybdenum alloy matrix, a chromium bottom coating is deposited on the surface of the molybdenum alloy matrix after cleaning is performed, and finally a FeCrAl cladding layer is deposited on the chromium bottom coating. The preparation method has the advantages that the technology is simple, rapid and stable, cladding layer components are precisely controlled, and industrial production is easily achieved. The obtained FeCrAl cladding layer is well combined with the molybdenum alloy matrix, the structure is compact, and the molybdenum alloy matrix is not oxidized.

Description

technical field [0001] The invention belongs to the technical field of material surface engineering, and in particular relates to a preparation method of a FeCrAl coating on a molybdenum alloy substrate. Background technique [0002] As a refractory metal, molybdenum has a melting point of 2620°C and is easy to machine and press. Molybdenum and its alloys have excellent high-temperature mechanical properties, low thermal expansion coefficient, and high electrical and thermal conductivity. They are widely used as high-temperature structural materials and functional materials, and are one of the most promising refractory metal materials. However, in the atmospheric environment, molybdenum alloys begin to be oxidized at a temperature of 300-475 ° C, forming MoO 2 Film; MoO between 475°C and 700°C 2 The color of the film becomes darker, accompanied by MoO 2 Volatile, its volatilization rate increases with the increase of temperature, and the oxidation is accelerated. In orde...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/16C23C14/02
CPCC23C14/022C23C14/025C23C14/165C23C14/345C23C14/352
Inventor 张国君曹琳琳王涛任帅
Owner XIAN UNIV OF TECH
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