Microlenses for multibeam arrays of optoelectronic devices for high frequency operation
A technology of laser arrays and microlenses, which is applied to laser parts, lasers, electrical components, etc., can solve regulatory problems, safety interference and other problems
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[0040] A VCSEL array device such as that described in U.S. Patent No. 5,812,571 is a flip-chip VCSEL array device that employs a metal contact layer that also serves as a reflector for the top mirror and is formed on each above the countertop. This single metal layer is typically deposited using techniques such as electron beam (e-beam) evaporation or sputtering to create a highly uniform or reflective surface. Although these deposition techniques are normal for the application, they are inappropriate when seeking to achieve thick metal layers surrounding the mesas, which is crucial for improved heat reduction in such devices. In order to deposit sufficiently thick layers using existing techniques, large quantities of metals, such as gold (Au), must be used, which significantly increases the cost of such equipment. This type of design, as well as that of other existing VCSEL array devices, also increases the overall impedance of the system and complicates thermal management, ...
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