Microlenses for multi-beam arrays of optoelectronic devices operating at high frequencies
A laser array and microlens technology, applied in laser parts, lasers, electrical components, etc., can solve problems such as safety interference and supervision issues
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[0040] The VCSEL array device (such as the VCSEL array device described in U.S. Patent No. 5,812,571) is a flip-chip VCSEL array device using a metal contact layer that also serves as a reflector for the top mirror and is formed in each Above the countertop. The single metal layer is usually deposited using techniques such as electron beam (e-beam) evaporation or sputtering to create a highly uniform or reflective surface. Although these deposition techniques are normal for the application, they are not appropriate when seeking to achieve a thick metal layer surrounding the mesa, which is essential for improved heat reduction in such devices. In order to deposit sufficiently thick layers using existing techniques, a large amount of metal such as gold (Au) must be used, which significantly increases the cost of such equipment. This type of design and the design of other existing VCSEL array devices also increases the total impedance of the system and complicates thermal managem...
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