Cutting device
A cutting device and cutting feed technology, applied in the manufacturing of electrical components, circuits, semiconductor/solid-state devices, etc., can solve the problems of increasing the number of spray nozzles, unable to obtain deburring effect, increasing the width of spray nozzles, etc., and achieve a cheap structure , good deburring effect
Active Publication Date: 2019-08-16
DISCO CORP
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Problems solved by technology
[0006] However, the cutting device described in Patent Document 1 is configured to spray high-pressure water at a width larger than the width of the plate-shaped workpiece. Therefore, when the width of the plate-shaped workpiece is further increased, it is necessary to increase the width of the spray nozzle or increase the spray pressure. Number of nozzles
Therefore, it is difficult to maintain the pressure of the high-pressure water sprayed from the spray nozzle at a high level, and the pressure of the high-pressure water decreases, resulting in a problem that a good deburring effect cannot be obtained.
In order to maintain the pressure of high-pressure water, it is also conceivable to introduce a large-capacity compressor, but this is not preferable from the viewpoint of cost.
Method used
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[0026] Hereinafter, a cutting device according to this embodiment will be described with reference to the drawings. figure 1 It is a perspective view of the cutting device of this embodiment. figure 2 It is a side view of the cutting device of this embodiment. image 3 is viewed from arrow A figure 2 Schematic of the spray nozzle shown. In addition, although an example of a cutting device is demonstrated below, the structure of the cutting device of this embodiment is not limited to this. Any structure may be adopted for the cutting device as long as it can cut a plate-shaped workpiece. also, figure 1 In , the size of the plate-shaped workpiece is exaggerated with respect to the chuck table.
[0027] Such as figure 1 and figure 2 As shown, the cutting device 1 is configured to divide the plate-shaped workpiece W held on the chuck table 4 into individual chips by relatively moving the chuck table 4 with respect to the cutting unit 3 . The plate-shaped workpiece W is ...
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The present invention provides a cutting device capable of spraying high-pressure water while maintaining a high pressure without using a large-capacity compressor, and obtaining a good deburring effect with an inexpensive structure. The cutting device (1) has: a chuck table (4), which holds a plate-shaped workpiece (W); a θ table (14), which rotates the chuck table; a cutting unit (3), which passes a cutting tool (31 ) for cutting a plate-shaped workpiece; a cutting feed unit (15), which makes the chuck table and the cutting unit relatively perform cutting feed in the X direction; and a deburring unit (5), which removes the cutting edge formed on the plate-shaped workpiece Groove (G) glitches. The deburring unit has a deburring nozzle (51) that sprays high-pressure water on the upper surface of the plate-shaped workpiece. The chuck table rotates every predetermined angle, and is cut and fed by the high-pressure water sprayed from the deburring nozzle.
Description
technical field [0001] The present invention relates to a cutting device for cutting a plate-shaped workpiece with a cutting tool, in particular to a cutting device for cutting a package substrate with a cutting tool. Background technique [0002] Plate-like workpieces such as package substrates are formed by injecting resin on a base material composed of a resin substrate. Burrs are generated in cutting grooves formed by cutting such a plate-shaped workpiece with a cutting tool. In order to remove such burrs, a cutting device equipped with a spray nozzle for spraying high-pressure water onto a machined plate-shaped workpiece has been proposed (for example, refer to Patent Document 1). In the cutting device described in Patent Document 1, a plurality of spray nozzles are arranged in a row, and high-pressure water is sprayed on the upper surface of the plate-shaped workpiece with a width larger than the width of the plate-shaped workpiece in the longitudinal direction. In t...
Claims
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IPC IPC(8): B23D79/00H01L21/67
CPCH01L21/67092B23D79/00
Inventor 植山博光栗村茂也
Owner DISCO CORP