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A device for testing electronic peeling film and its application

A peeling film and electronic technology, which is applied in the direction of measuring devices, measuring electricity, measuring electrical variables, etc., to achieve the effect of reducing radiation dose, improving development efficiency, and reducing device cost

Active Publication Date: 2018-10-26
DONGGUAN NEUTRON SCI CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, at present, there is no relevant device and research on the electronic peeling film in China.

Method used

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  • A device for testing electronic peeling film and its application
  • A device for testing electronic peeling film and its application
  • A device for testing electronic peeling film and its application

Examples

Experimental program
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Embodiment

[0033] The electronic peeling film test device in this example, such as figure 1As shown, it includes a cavity 1, a vacuuming device, an electronic peeling film clamping assembly, an electron gun 4, a first Faraday cup, a second Faraday cup 52, an illumination device 6, an imaging device 7, a temperature detection device 8, and an electronic shielding block. The cavity 1 has an openable top cover 11, which forms a closed sealed cavity after the top cover 11 is closed; in this example, the side wall of the cavity 1 is provided with eight external interfaces for connecting vacuum equipment, Electron gun 4, first Faraday cup, second Faraday cup 52, lighting equipment 6, camera equipment 7, temperature detection equipment 8, electronic shielding block, etc. Wherein, the vacuuming equipment is made up of molecular pump 21 and ion pump 22, and molecular pump 21 and ion pump 22 are respectively installed on the two external interfaces on the side wall of chamber body 1, and vacuum is...

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Abstract

The invention discloses an apparatus for testing an electronic peeling membrane, and an application thereof. The apparatus for testing the electronic peeling membrane comprises a cavity, a vacuum-pumping device, an electronic peeling membrane clamping assembly, an electronic gun, a first Faraday cup and a second Faraday cup, wherein the cavity is provided with a top cover which can be open and closed, and a sealed cavity is formed when the top cover is closed; the vacuum-pumping device employs cavity vacuum-pumping; the electronic peeling membrane clamping assembly is installed in the cavity; the electronic gun is installed at the inner side wall of the cavity and is used for bombarding an electronic peeling membrane to be tested; the first Faraday cup is fixed at a beam outlet of the electronic gun; and the second Faraday cup is arranged at the inner side wall of the cavity opposite to the electronic gun. The apparatus provided by the invention can simulate a vacuum and beam injection environment where the electronic peeling membrane works; the apparatus employs an electron beam, reduces the cost, reduces the radiation quantity and improves the equipment safety; and membrane performance can be more accurately grasped, and the apparatus has great significance on selection and design of an electronic peeling membrane of a spallation neutron source, reduces the development cost of the peeling membrane and improves the development efficiency.

Description

technical field [0001] The present application relates to the field of electronic peeling film testing equipment, in particular to a device for testing electronic peeling film and its application. Background technique [0002] The electron stripping film is an important factor to ensure the beam quality in the spallation neutron source, and its main function is to strip the electrons on the heavy particles. In addition, in high-current proton accelerators such as heavy ion accelerators and medical accelerators, electron stripping membranes are also key components. Therefore, the quality and performance of the electron stripping film are the key factors affecting the beam quality. However, the thickness of the electron stripping film is only tens to hundreds of nanometers, and its stiffness and strength are very low and fragile. In addition, during the electron stripping process of the beam, nuclear reactions, temperature rise, internal stress release, etc., lead to electron...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01R31/00
CPCG01R31/00
Inventor 陈佳鑫康玲余洁冰
Owner DONGGUAN NEUTRON SCI CENT
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