A constant temperature control system suitable for excimer laser

Abstract

The invention discloses a constant temperature control system suitable for excimer lasers, which includes a main circuit and a branch circuit. The constant temperature control system also includes an electromagnetic valve, a first flow sensor, a flow divider and a collecting flow device, the first proportional valve, the second proportional valve, the second flow sensor, the third flow sensor, the automatic temperature control cavity and the first one-way valve, the lower computer and the lower computer Communication industrial computer. The industrial computer is used to send instructions to control the repetition frequency of the excimer laser, and transmits the repetition frequency information to the lower computer through the RS485 protocol; the lower computer is used to control the repetition frequency accordingly according to the repetition frequency information The flow rate of the first proportional valve and the second proportional valve, and then automatically control the temperature of the automatic temperature control chamber to maintain the target temperature by taking the repetition frequency as the feed-forward.

Description

technical field [0001] The invention belongs to the field related to temperature control of excimer lasers, and more specifically relates to a constant temperature control system suitable for excimer lasers. Background technique [0002] As an ultraviolet beam that can be precisely focused and controlled, excimer laser has become the main light source of current lithography devices due to its advantages such as short wavelength, high pulse power density, narrow pulse width, and weak coherence. In recent years, in order to make the width of the spectrum narrower and the laser power higher, the double-cavity structure has been introduced into the design of the laser, and most of the energy input into the excimer laser is converted into heat, which will affect the working gas. The temperature and the temperature of the working gas have a great influence on the light output performance and life of the laser. [0003] Relevant personnel in this field have done some research on h...

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Problems solved by technology

However, since the temperature control system has no feedback for the repetition rate of the laser and the repetition rate span of the laser is relatively large, the repetition rate of the laser controls the number of pulses per unit time, and the discharge of each pulse generates heat, resulting in a significant difference in the repetition rate. The temperature fluctuation has a great influence, and may even make the temperature exceed the requirement. When the frequency of the laser changes, the temperature control effect is poor, the temperature fluctuates greatly, and the adjustment lags

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