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Film thickness detection device

A detection device and film thickness technology, applied in the direction of measurement device, electromagnetic measurement device, electric device, etc., can solve the problem of low detection accuracy, and achieve the effect of high detection accuracy

Active Publication Date: 2016-11-09
WEIHAI HUALING OPTO ELECTRONICS CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The main purpose of this application is to provide a film thickness detection device to solve the problem of low detection accuracy of the film thickness detection device in the prior art

Method used

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Embodiment Construction

[0030] It should be pointed out that the following detailed descriptions are all illustrative and are intended to provide further explanations for the application. Unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs.

[0031] It should be noted that the terms used here are only for describing specific implementations, and are not intended to limit the exemplary implementations according to the present application. As used herein, unless the context clearly indicates otherwise, the singular form is also intended to include the plural form. In addition, it should also be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate There are features, steps, operations, devices, components, and / or combinations thereof.

[0032] As described in the background art, the detection accuracy o...

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Abstract

The invention provides a film thickness detection device comprising a common unit, a detection unit and a signal processing unit. The common unit comprises at least one common electrode. The detection unit comprises at least one sensor chip. The sensor chips and the common unit are arranged oppositely at intervals in the first direction. The interval between the common unit and the sensor chips forms a to-be-tested film transfer channel. Each sensor chip comprises at least one row of detection electrodes arranged along the second direction which is vertical to the moving direction of the to-be-tested film. The first direction is vertical to a first plane in parallel with the second direction. The sensor chips are used for sensing and outputting electric signals on the common electrodes. The signal processing unit is electrically connected with the sensor chips and processes and outputs the electric signals output from the sensor chips. The film thickness detection device can be flexibly adjusted in the accuracy and may obtain high detection precision.

Description

Technical field [0001] This application relates to the technical field of thickness detection, and in particular, to a film thickness detection device. Background technique [0002] On-line continuous thickness measurement of sheet-like items, such as paper, bills, plastic films to be tested, textile items, etc., is becoming more and more important in the production, testing, processing, and recycling of its products. At present, the detection technology of the film thickness to be measured includes the use of Hall devices, reflective ultrasonic detection, transmission ultrasonic detection, electromagnetic induction detection, eddy current detection and other technologies. However, the detection devices corresponding to these technologies are large in size and high in cost, which is not conducive to the application of these technologies. [0003] In recent years, the detection technology of the film thickness to be measured by electrostatic induction between electrodes is under co...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B7/06
CPCG01B7/08G01B7/06G07D7/164G01R27/2605G01B7/003G01B7/023G01B7/105G01B7/14G01B21/08H01L22/12H01L22/34H01L2924/00H01L2924/0002
Inventor 戚务昌
Owner WEIHAI HUALING OPTO ELECTRONICS CO LTD
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