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Method for identifying multi-element characteristic spectrum peaks in energy dispersion X-ray fluorescence spectrum

A technology of energy dispersion and fluorescence spectroscopy, which is applied in the field of X-ray fluorescence spectroscopy detection, can solve the problems of inability to judge and identify spectral peaks, and cannot accurately explain the simultaneous existence of spectral peaks, so as to achieve the effect of accurate identification

Inactive Publication Date: 2016-11-23
HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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Problems solved by technology

[0007] In this way, in the actual sample detection, because the types of elements contained in the sample are unknown, when multiple elements exist at the same time, the peaks in the measured energy dispersive XRF spectrum may be the overlapping peaks of the above-mentioned elements with similar peak energy. Therefore, the above-mentioned The method of identifying and judging spectral peaks by setting the maximum energy deviation threshold comparison, according to the application publication number CN105548230A patent, setting the maximum deviation threshold as 50eV, cannot accurately judge and identify the spectral peaks in the measured XRF spectrum, let alone accurately explain the two spectra Simultaneous presence of peaks

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  • Method for identifying multi-element characteristic spectrum peaks in energy dispersion X-ray fluorescence spectrum
  • Method for identifying multi-element characteristic spectrum peaks in energy dispersion X-ray fluorescence spectrum
  • Method for identifying multi-element characteristic spectrum peaks in energy dispersion X-ray fluorescence spectrum

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Embodiment

[0061] This embodiment takes the energy dispersive XRF spectrum of calcium (Ca) element and tellurium (Te) element and the energy dispersive XRF spectrum of a film sample mixed with the two elements as examples. In the energy dispersive XRF spectrum, the energy dispersive XRF spectrum of Ca element and Te element The peak-to-peak energies of the characteristic spectra are shown in Table 2:

[0062] Table 2: Peak energy of characteristic spectrum peaks of Ca element and Te element

[0063]

[0064] Among them, the peak-to-peak energies of Kα and Kβ characteristic spectra of Ca element are very close to the peak-to-peak energies of Lα and Lβ characteristic spectra of Te element, and the energy differences are 0.08keV and 0.02keV, respectively.

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Abstract

The invention discloses a method for identifying multi-element characteristic spectrum peaks in an energy dispersion X-ray fluorescence spectrum. The method comprises the following steps: carrying out independent component analysis on an XRF two-dimensional spectrum measured from an actual sample, utilizing an obtained preliminary analysis result as an initial solution of non-negative matrix factorization, carrying out precise solving by virtue of iteration correction of the non-negative matrix factorization, carrying out contrastive analysis on a differential spectrum of a solved single-element calculation spectrum and a differential spectrum of a standard spectrum, and determining the similarity of the two differential spectrums by virtue of Pearson's correlation coefficient, so as to accurately identify element characteristic spectrum peaks; and obtaining the concentration values of corresponding elements according to the solved single-element calculation spectrum and an established standard curve, and realizing quantitative analysis. The method can be effectively applied to the effective identification of the multi-element characteristic spectrum peaks in the energy dispersion XRF spectrum and the quantitative detection of the elements.

Description

technical field [0001] The invention relates to the technical field of X-ray fluorescence spectrum detection, in particular to a method for identifying multi-element characteristic spectrum peaks in energy dispersive X-ray fluorescence spectrum. Background technique [0002] As a kind of atomic emission spectroscopy, X-ray fluorescence (X-ray Fluorescence, referred to as XRF) spectroscopy has the characteristics of simple sample pretreatment, non-destructive, fast analysis speed, and simultaneous measurement of multiple elements. It has become an effective means for rapid, non-destructive and on-site detection of heavy metals. XRF spectroscopy is to excite the sample to be tested by generating high-energy X-rays to generate characteristic secondary X-rays (also called X-ray fluorescence), and to characterize the sample to be tested according to the wavelength or energy and fluorescence intensity of the characteristic X-ray fluorescence. and quantitative analysis. At presen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N23/223
CPCG01N23/223
Inventor 甘婷婷赵南京殷高方肖雪戴庞达
Owner HEFEI INSTITUTES OF PHYSICAL SCIENCE - CHINESE ACAD OF SCI
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