A small f-number multi-wavelength standard spherical reference lens group

A standard spherical surface, multi-wavelength technology, applied in the direction of lens, instrument, installation, etc., can solve the problem of difficult adjustment process of standard spherical reference lens assembly
CN106154362BInactive Publication Date: 2017-12-08NANJING UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NANJING UNIV OF SCI & TECH
Publication Date
2017-12-08
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a small F-number multi-wavelength standard spherical reference lens group, the working wavelengths are 632.8nm, 543.5nm and 532nm, and the achromatism of the lens group is realized by using crown glass ZK7 with low dispersion and flint glass ZF6 with high dispersion; It adopts 3-piece lens design, which is composed of a doublet positive lens, a negative lens and a positive lens whose last surface is a standard spherical surface; the design theoretical values ​​of the aperture, F number and vertex focal length of the reference lens group are 100mm, F / 3 and 254.7mm respectively ;Except for the last mirror in the reference lens group, all the mirrors are coated with three-point anti-reflection coatings of 632.8nm, 543.5nm and 532nm; the combination of double-glued positive lens and negative lens is used to realize the approximate afocal of the optical path structure and reduce the The sensitivity of the coincidence error between the focal point and the center of curvature of the end surface changes with the distance between the mirrors is improved, and it is convenient for the assembly and adjustment of small F-number standard spherical lens groups.
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Description

technical field

[0001] The invention belongs to the field of optical instruments, and in particular relates to a small F-number multi-wavelength standard spherical reference lens group. Background technique

[0002] Optical interference testing technology has a very wide range of applications in the surface shape of optical components, the characteristic parameters of optical materials and the performance testing of optoelectronic systems due to its advantages of high precision and non-contact non-destructive measurement.

[0003] Yeou-Yen Cheng et al. proposed the principle of two-wavelength phase shifting interferometry in "Two-wavelength phase shifting interferometry" (APPLIED OPTICS, 24(23): 4539-4543, 1984). By solving the synthetic wavelength phase, the single While the wavelength phase-shifting interferometer has a test range, it can retain high test accuracy.

[0004] When the interferometer detects the spherical surface shape, it needs to be equipped with a standar...

Claims

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