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Supporting system for a heating element

A support system and heating unit technology, which is applied to furnace heating elements, electrical components, circuits, etc., can solve problems such as plastic deformation of heating units, achieve the effects of reducing mechanical stress, reducing risks, and increasing service life

Active Publication Date: 2016-11-23
PLANSEE SE +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

As a result, mechanical stress builds up upon heating, resulting in plastic deformation of the shape of the heating unit

Method used

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  • Supporting system for a heating element
  • Supporting system for a heating element
  • Supporting system for a heating element

Examples

Experimental program
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Effect test

Embodiment Construction

[0037] according to Figure 1a and Figure 1b The support system (100) of the embodiment in includes an elongated rigid support member (111) having a distal end (112) and a proximal end (113). On top of the rigid support member (111) is mounted a heating unit (not shown), the extension of which defines an extension plane. The main extension of the support member (111) extends in a height direction z which is perpendicular to the extension plane of the heating unit. The support system also comprises a base member (121) secured to a support plate (not shown), for example with screws or any other kind of mechanical fastener. A spring unit (122) is located between the support member (111) and the base member (121), and in this embodiment, the spring unit is implemented with at least two leaf springs (122a, 122b). The spring unit (122) is fixed to the distal end portion of the support member (111) by means of a rigid connection member (123) using screws, rivets, welding or other ...

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PUM

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Abstract

The invention relates to a supporting system (100, 201, 301, 400, 401) for support of a heating element (450) comprising a supporting member (111, 211, 311) and a resilient system. The supporting member has a main extension direction extending substantially in a height direction and a proximal (113, 213, 313) and distal end (112, 212, 312). The proximal end (113, 213, 313) is adapted to support the heating element (450). The resilient system comprises a spring element (122, 222, 322) which is coupled to a distal portion of the supporting member (111, 211, 311) and provides resiliency of the supporting member in a resilient direction and substantially restricts movements of the supporting member in a rigid direction. Furthermore, the resilient system extends at least partially from the distal portion in the height direction towards the proximal end.

Description

technical field [0001] The invention relates to a support system for supporting a heating unit and a heating system comprising at least one heating unit. Background technique [0002] Furnaces or electric heaters comprising resistive heating units are well known and used in various applications in different industries. Thus, heat is generated when an electric current is applied through an electrically conductive heating element (also called a heating wire), and the electrical energy is dissipated as heat due to electrical resistance. Typically, the heating unit is placed in close proximity to the item or material to be heated. Heater systems for various applications such as reactors for MOCVD (Metal Organic Chemical Vapor Deposition) techniques used in the processing of semiconductor materials (for example, for the epitaxial growth of compound semiconductors) require significantly high temperature (eg above 800°C) operation, thus presenting challenges to the design and mat...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H05B3/66H01L21/67H01L21/687
CPCH01L21/67103H01L21/68785H05B3/66
Inventor 瓦迪姆·博古斯拉夫斯基阿尔诺·普兰肯施泰纳
Owner PLANSEE SE
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