Flexible substrate MEMS device curved array photoacoustic imaging system
A photoacoustic imaging and flexible substrate technology, applied in the fields of sensors, medical science, diagnosis, etc., can solve the problems of large structure, time-consuming and complicated photoacoustic imaging devices, and achieve the goal of simplifying the structure, speeding up the imaging speed and reducing the volume Effect
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[0026] see figure 1 In this embodiment, the photoacoustic imaging system for the curved surface array of the flexible substrate MEMS device includes a light source module, a photoacoustic module, a signal acquisition module, an image module and a control module.
[0027] Such as figure 2 , image 3 , Figure 4 and Figure 7 As shown, the photoacoustic module 16 has a layer structure, and the layer structure is stacked sequentially from bottom to top to be MEMS micromirror array and fiber channel layer 4, flexible printed circuit board interconnection layer 3, MEMS acoustic transducer array layer 2 and acoustic impedance matching Layer 1; wherein, the MEMS acoustic transducer array layer 2 is fixed on the upper surface of the flexible printed circuit board interconnection layer 3 by welding; the main body of the MEMS micromirror array and the fiber channel layer 4 is a flexible polymer structure. Channels and grooves are made on the flexible polymer structure, and MEMS mic...
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