A dual cycle temperature and humidity control system

Abstract

The invention belongs to the technical field of control and provides a double-cycle temperature and humidity control system. The purification plant includes a plurality of purification workshops, and an upper interlayer is included on the top of the purification plant; the double-cycle temperature and humidity control system includes a fresh air unit and a plurality of fans. The filter unit and multiple dry pipe coils, among which, the fresh air unit is set outside the purification plant and connected to the upper mezzanine of the purification plant, the fan filter unit is set on the top of the purification plant and the lower part of the upper mezzanine, and the dry pipe plate is set outside the purification workshop. The top of the mezzanine is connected to the upper mezzanine of the purification plant; the fresh air unit processes the fresh air and sends it to the upper mezzanine, and the return air in the purification workshop enters the upper mezzanine through the dry coil on the technical mezzanine and mixes with the treated fresh air. The mixed gas passes through the fan filter unit and then enters the purification workshop. The system has high precision and can reach a temperature of ±0.5°C and a humidity of ±3%RH.

Description

technical field [0001] The invention belongs to the technical field of control, and in particular relates to a double-cycle temperature and humidity control system. Background technique [0002] With the rapid development of the IC (Integrated Circuit, integrated circuit) circuit industry, the integration level of integrated circuits is gradually increasing, and the requirements for the mask plate making industry are becoming more and more stringent. There are many links that affect the mask plate making process. In addition to the technological level of the equipment itself needing to meet the requirements for production, temperature and humidity control has become a key factor in determining the technological level. [0003] In recent years, the field of temperature and humidity control in purification plants has developed rapidly, the structure of air conditioning systems has been constantly changing, and the control theory and methods have been constantly innovating. Th...

AI Technical Summary

Problems solved by technology

However, due to factors such as the number of people in the room and the heat generated by the equipment, the temperature and humidity of the return air flow fluctuate greatly, resulting in low temperature and humidity control accuracy of the mixed supply air. Generally, the control accuracy of this type of system is: temperature ±1~±2 ;Humidity ±5%RH~±10%RH, and the air volume of the system is large, the equipment occupies a large area and power consumption, and the operating cost is high

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