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Integrated magnetic switch and manufacturing method thereof

An integrated magnetic and manufacturing method technology, which is applied in the manufacture/processing of electromagnetic devices, resistors controlled by magnetic field, devices using electro-magnetic effects, etc., can solve the problems of large volume of magnetic switches, and improve quality and reliability Sexuality, volume reduction effect

Inactive Publication Date: 2016-12-14
HANGZHOU SILAN INTEGRATED CIRCUIT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to provide an integrated magnetic switch and its manufacturing method to solve the problem that the volume of the existing magnetic switch is still large

Method used

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  • Integrated magnetic switch and manufacturing method thereof
  • Integrated magnetic switch and manufacturing method thereof
  • Integrated magnetic switch and manufacturing method thereof

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Embodiment Construction

[0074] An integrated magnetic switch and a manufacturing method thereof proposed by the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become apparent from the following description and claims. It should be noted that, the accompanying drawings are all in a very simplified form and in inaccurate scales, and are only used to facilitate and clearly assist the purpose of explaining the embodiments of the present invention. In particular, each drawing needs to show different emphases, and different scales are often used.

[0075] Please refer to figure 1 , which is a schematic diagram of the working principle of the integrated magnetic switch according to the embodiment of the present invention. like figure 1 As shown, in the embodiment of the present application, the magnetoresistive strips 20 are fabricated on the ASIC circuit 10 through...

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Abstract

The present invention provides an integrated magnetic switch and a manufacturing method thereof. A magnetoresistance strip is prepared on an ASIC circuit by a semiconductor process, so that the volume of the formed integrated magnetic switch can be effectively reduced. Further, a first metal layer is formed by adopting a stripping process to effectively avoid damage of corrosion of connection holes and sputtering corrosion before connection metal deposition to the magnetoresistance strip, namely the quality and the reliability of the formed integrated magnetic switch are improved.

Description

technical field [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to an integrated magnetic switch and a manufacturing method thereof. Background technique [0002] A magnetic switch is a component that is switched and controlled by a magnetic field signal. Magnetic field signals have strong penetrating power and can penetrate most materials, such as glass, plastic, wood, rock, dust, and non-magnetic metals, to achieve signal transmission. Magnetic switches are widely used in various non-contact control systems with their unique advantages, and the application fields include security, medical, military, industrial control, transportation, smart home, etc. [0003] At present, there are two main types of common magnetic switches, one is non-integrated magnetic switches, such as reed switches, electromagnetic induction coils, etc.; the other is integrated magnetic switches, which are composed of magnetic sensitive components (ma...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L43/00H01L43/08H01L43/12H01L25/00H10N50/01H10N50/10
CPCH01L25/00H10N50/00H10N50/10H10N50/01
Inventor 陈雪平闻永祥刘琛孙伟
Owner HANGZHOU SILAN INTEGRATED CIRCUIT