Spatial and angular assembling device for micro-devices

An assembly device and space angle technology, which is applied in the direction of assembly machines, metal processing, metal processing equipment, etc., can solve the problems of less angle assembly, inability to clamp and enlarge the angle adjustment of micron-level filaments, and insufficient freedom of angle and posture adjustment, etc.

CN106271587AInactive Publication Date: 2017-01-04LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Publication Date
2017-01-04
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a spatial and angular assembling device for micro-devices. The spatial and angular assembling device is used for spatially and angularly assembling micron-grade fine filaments and the cylindrical micro-devices and comprises a control host, a two-dimensional orthogonal microscopic vision observing device, a cylindrical micro-device attitude adjusting device and a thin filament pose adjusting device. The spatial and angular assembling device has the advantages that the cylindrical micro-device attitude adjusting device has three rotational degrees of freedom, three rotary shafts intersect with one another at a point owing to structural designs, the geometric centers of the cylindrical micro-devices are positioned at the intersection point of the three rotary shafts, accordingly, the micro-devices are assuredly always positioned in microscopic vision fields of view when attitudes of the cylindrical micro-devices are adjusted, the random attitudes of the cylindrical micro-devices can be adjusted in three-dimensional spaces, and various spatial and angular assembly requirements can be met; a fine filament pose adjusting mechanism has five degrees of freedom and is used for positioning spatial poses of the micron-grade fine filaments and fittingly assembling the micron-grade fine filaments; the micron-grade fine filaments and the cylindrical micro-devices can be spatially and angularly assembled under high-precision conditions by the spatial and angular assembling device, and the assembly precision can reach 0.3 degree.
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Description

technical field

[0001] The invention belongs to the technical field of micro-assembly, and in particular relates to a space angle assembly device for micro-devices, which is used for space-angle assembly of micron-level filaments and cylindrical micro-devices. Background technique

[0002] With the development of micro-electro-mechanical systems, higher requirements are put forward for the assembly of tiny parts. The micro-assembly robot system based on microscopic vision guidance provides an effective solution for the spatial assembly of tiny parts.

[0003] An online assembly device for submillimeter-level micro-part assembly developed by Wuhan University of Technology and Hunan University of Science and Technology (Hu Xiaoping, Chen Guoliang, Yang Xiaoyan, Li Jun. Research on Microscopic Vision System of Micro-manipulation Robot, Automated Instruments, 2007, 28 (2) : 5-9.), using the stereoscopic microscopic vision scheme formed in an orthogonal manner, to form a stereos...

Examples

Embodiment 1

[0033] In Example 1, the micro vision component I1 and the micro vision component II2 are both composed of TXG50CCCD from Baumer Company of Switzerland and a variable magnification microscope lens from Navitar Company of the United States. Both the microvision position adjustment mechanism I and the microvision position adjustment mechanism II have electric position adjusters along the three directions of X, Y, and Z, which are respectively used for the microvision component I1 and the microvision component II2 along the Focus position adjustment in the optical axis direction and position adjustment along the X, Y, and Z axes. Such as figure 2 As shown, the filament pose adjustment mechanism 6 has five degrees of freedom, which are a three-dimensional electric position adjuster along the X, Y, and Z axes and a two-dimensional electric rotation adjuster around the X, Y axes. The attitude adjustment mechanism 8 of the cylindrical micro-device includes a three-dimensional elect...