The application discloses a kind of dynamic
phase shift interferometry system and method thereof, including first
depolarization beam splitter, first
depolarization beam splitter side is sequentially spaced with first
polarizer, collimating lens, pinhole filter, first attenuator and
laser, the other side is sequentially spaced with third
polarizer and object, the upside of first
depolarization beam splitter is sequentially spaced with second
polarizer, second attenuator and first mirror, the downside of first depolarization beam splitter is sequentially spaced with
imaging lens, second depolarization beam splitter, polarization
grating and second mirror, the side of second depolarization beam splitter is provided with camera;Polarization
grating is
liquid crystal circular polarization grating,
liquid crystal molecule
fast axis orientation is periodic continuous gradual change along x direction, overall has λ / 2 phase
delay amount.The application can ensure high-precision phase measurement results while meeting the demand of dynamic measurement.