Polysilicon Reduction Furnace
A reduction furnace and polysilicon technology, applied in the fields of silicon compounds, climate sustainability, inorganic chemistry, etc., can solve the problems of the promotion and application of large-scale polysilicon reduction furnaces, the unreasonable structural design of polysilicon reduction furnaces, and the low production capacity and production efficiency. Achieve the effect of facilitating integration and large-scale, easy installation and maintenance, and improving production quality and production efficiency
Active Publication Date: 2019-03-01
CHINA ENFI ENGINEERING CORPORATION
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Problems solved by technology
[0002] The structural design of the existing polysilicon reduction furnace is not reasonable enough, which leads to difficulties in installation and maintenance, which hinders the popularization and application of large polysilicon reduction furnaces, and the production capacity and production efficiency are not high, and the energy consumption is large
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[0033] Embodiments of the present invention are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals designate the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present invention and should not be construed as limiting the present invention.
[0034] In describing the present invention, it is to be understood that the terms "center", "upper", "lower", "vertical", "horizontal", "top", "bottom", "inner", "outer", The orientation or positional relationship indicated by "radial", "circumferential", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying the referred device or element Must be in a particular orientation, ...
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The invention discloses a polycrystalline silicon reduction furnace which comprises a furnace body, a chassis assembly, an air inlet system and an air outlet system. The chassis assembly comprises a chassis body, electrodes, air inlet end pipes and air outlet end pipes, the furnace body and the chassis body define a reaction cavity, multiple electrodes are arranged on the chassis body, provide an installation foundation for a sedimentation carrier silicon core and are arranged on the chassis body for multiple circles, the circles of electrodes are arranged at intervals, the centers are located on the central axial of the chassis body, multiple circles of electrodes are arranged in the radial direction of the chassis body, multiple air inlet end pipes are arranged on the chassis body and located among the adjacent circle of electrodes and the center of the chassis body, and multiple air outlet end pipes are arranged on the chassis body and located between the outmost circle of electrodes and the innermost circle of electrodes. The air inlet system is connected with the air inlet end pipes, and the air outlet system is connected with the air outlet end pipes. The polycrystalline silicon reduction furnace has the advantages of being compact in structure, integrated, large-sized, high in single-furnace yield, excellent in production quality, capable of saving energy and efficient.
Description
technical field [0001] The invention relates to the technical field of polysilicon production, in particular to a polysilicon reduction furnace. Background technique [0002] The structural design of the existing polysilicon reduction furnace is not reasonable enough, which leads to difficulties in installation and maintenance, which hinders the popularization and application of large polysilicon reduction furnaces, and the production capacity and production efficiency are not high, and the energy consumption is relatively large. Contents of the invention [0003] The present invention aims to solve at least one of the technical problems existing in the prior art. Therefore, the present invention proposes a polysilicon reduction furnace, which has the advantages of compact structure, large-scale integration, high single furnace output, excellent production quality, energy saving and high efficiency. [0004] The polysilicon reduction furnace according to the embodiment of...
Claims
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IPC IPC(8): C01B33/035
CPCC01B33/035Y02P20/10
Inventor 汪绍芬石何武杨永亮严大洲汤传斌姚心
Owner CHINA ENFI ENGINEERING CORPORATION