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Manufacturing process management and control line generating method and device, and manufacturing process management and control system

A control and process technology, applied in general control systems, control/regulation systems, program control, etc., can solve problems such as strict control lines and false alarms

Active Publication Date: 2017-01-11
SEMICON MFG INT (SHANGHAI) CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] Embodiments of the present invention provide a method and device for generating a process control line and a process control system to at least solve the technical problem that the existing automatic control system can only tighten the control line, resulting in false alarms caused by the control line being too strict

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  • Manufacturing process management and control line generating method and device, and manufacturing process management and control system
  • Manufacturing process management and control line generating method and device, and manufacturing process management and control system
  • Manufacturing process management and control line generating method and device, and manufacturing process management and control system

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Embodiment Construction

[0028] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0029] It should be noted that the terms "first" and "second" in the description and claims of the present invention and the above drawings are used to distinguish similar objects, but not necessarily used to describe a specific sequence or sequence. It is to be understood that the data so used are interchangeable under appropriate ...

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Abstract

The invention discloses a manufacturing process management and control line generating method, a manufacturing process management and control line generating device, and a manufacturing process management and control system. The manufacturing process management and control line generating method comprises the steps of: acquiring current preset cycle fluctuation data of a data fluctuation chart; determining whether the current preset cycle fluctuation data includes abnormal data; if not, acquiring historical valid data of the data fluctuation chart, wherein the historical valid data is historical data in which abnormal data is filtered out; and generating a management and control line according to the current preset cycle fluctuation data and the historical valid data. The manufacturing process management and control line generating method, the manufacturing process management and control line generating device and the manufacturing process management and control system solve the technical problem of false alarm caused by an overstrict management and control line since the existing automatic management and control system can only tighten the management and control line.

Description

technical field [0001] The invention relates to the field of process manufacturing, in particular to a method and device for generating a process control line and a process control system. Background technique [0002] In the product manufacturing industry, especially the semiconductor integrated circuit manufacturing industry, data collection, data measurement and data control will directly affect the yield of products, etc. The accuracy of the data control line used to control data directly affects the effectiveness of control. [0003] The existing technology usually adopts an automatic control system (Auto Control Limit, referred to as ACL) to provide system control, analyze and calculate the data fluctuation chart, and obtain a new control line. After the new control line is signed and confirmed by relevant engineers, the production line will be controlled in time. At present, the calculation of the control line of the data fluctuation icon by ACL usually uses the mean...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05B19/418
CPCG05B19/4183Y02P90/02
Inventor 姚海燕
Owner SEMICON MFG INT (SHANGHAI) CORP
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