Leakage detection method for liquid packaging apparatus

A technology of liquid encapsulation and leak detection, which is applied in the direction of measuring the rate of increase and deceleration of the fluid, using liquid/vacuum degree to measure the liquid tightness, etc., which can solve the problems of instrument damage, instrument pollution, leakage, etc.

Active Publication Date: 2017-02-01
INST OF CHEM CHINESE ACAD OF SCI
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  • Claims
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Problems solved by technology

[0004] Due to the small size and low strength of the liquid-encapsulated device, after assembling two silicon wafers filled with liquid samples, there may be leakage. If the liquid-encapsulated device with leakage is placed in the In the sample room,

Method used

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Embodiment approach

[0049] According to another embodiment of the present invention, if the limit pressure value P4 is equal to the limit pressure value P3, and the time T4 is greater than the time T3, then there is leakage in the liquid packaging device; if the limit pressure value P4 = limit pressure value P3, and the time If T4 is less than or equal to time T3, then there is no leakage in the liquid packaging device. When the leakage of the liquid encapsulation device is obvious, most of the leaked liquid is vaporized and volatilized before being placed in the sample chamber 5, and the liquid encapsulation device is basically in a dry state. Therefore, due to the liquid contained in the liquid encapsulation device If the amount is small, it may cause all the liquid to vaporize and be pumped out by the vacuum pump device, but the time to reach the ultimate pressure is relatively longer.

[0050] Further, if T4-T3≤180s, it is determined that the time T4 is equal to the time T3, and there is no l...

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Abstract

The invention discloses a leakage detection method for liquid packaging apparatus. The to-be-detected liquid packaging apparatus is filled with a liquid sample. The method comprises the following steps: sealing a sample room; using a vacuum pump device to have the sample room vacuumed continuously; and measuring the pressure value P1 of the sample room in the different times of T1; opening the sample room and placing the liquid packaging apparatus; then sealing the sample room again; and using the vacuum pump device to have the sample room vacuumed continuously; and measuring the pressure value P2 of the sample room in the different times of T2; and comparing the time T1 and time T2 and the pressure value P2 and the pressure value P1 respectively so as to determine whether leakage occurs in the liquid packaging apparatus or not. Through the comparing of time and pressure of the sample room with the liquid packaging apparatus and without the liquid packaging apparatus under the vacuumed condition, it is possible to determine whether leakage occurs in the liquid sample component or not, and the method is especially suitable for use on liquid containers with the least leakage and can achieve high accuracy in leakage detection.

Description

technical field [0001] The invention relates to a leak detection method, in particular to a leak detection method of a liquid packaging device. Background technique [0002] With the rapid development of nanotechnology, electron microscopes, X-ray energy spectrometers and other instruments have become the main means of analyzing nano-scale microstructures and components. These instruments use electron beams, X-rays, etc. as light sources. interaction to obtain information on the microstructure and composition of the sample, and these instruments need to work in a high vacuum environment (usually the vacuum in the sample chamber is higher than 10 -4 Pa), correspondingly, this requires that the sample under observation is dry and free from volatiles. However, many samples have different structures between the liquid phase and the solid phase (after drying), such as the self-assembled structure of molecules such as vesicles in the liquid phase, the non-equilibrium structure of...

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Application Information

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IPC IPC(8): G01M3/32
CPCG01M3/32
Inventor 关波刘扬李祥岳纪玲
Owner INST OF CHEM CHINESE ACAD OF SCI
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