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A palladium alloy membrane purifier internal filling type positive pressure leak detection device

PendingCN122130292AImprove spillover efficiencyHigh detection sensitivity
This invention discloses an internally charged positive pressure leak detection device for a palladium alloy membrane purifier, comprising an outer shell with a leak detection port and a helium filling port at both ends. The interior of the outer shell is a cavity for accommodating the palladium alloy membrane purifier under test. The inlet of the palladium alloy membrane purifier is connected to the helium filling port, which is used to fill the palladium alloy membrane purifier with helium. The leak detection port is used to connect to a vacuum and leak detection device. This internally charged positive pressure leak detection device actively fills the palladium alloy membrane purifier with helium and sets up a vacuum detection chamber outside the purifier, creating a large differential pressure detection environment with a clear direction that is completely consistent with the actual operating conditions of the palladium alloy membrane purifier. This ensures that any microscopic leak channels that may open under actual working stress can be detected under these conditions, making it suitable for fields such as semiconductors, electronics, and proton exchange membrane fuel cells.
Owner:NORTHWEST INSTITUTE FOR NONFERROUS METAL RESEARCH