Uncooled infrared detector and manufacture method therefor

An uncooled infrared and detector technology, applied in the direction of electric radiation detectors, etc., can solve the problems of insufficient infrared absorption ability of infrared detectors, use restrictions, affecting the detection ability and application range of infrared detectors, etc., and achieves the improvement of infrared heat Radiation absorption ability, the effect of improving the infrared absorptivity

Inactive Publication Date: 2017-02-15
WUHAN GAOXIN TECH
View PDF5 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] The infrared absorption ability of existing uncooled infrared detectors is generally not strong enough, which affects the detection ability and application range of infrared detectors, especially in some occasions that require observation of subtle changes in temperature, such as the use of precise temperature measurement, etc., low resolution High-resolution detectors cannot distinguish small temperature differences, resulting in limited use. For this reason, high-resolution detectors can meet such applications due to their high responsivity and low NETD, so their research has become imminent.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Uncooled infrared detector and manufacture method therefor
  • Uncooled infrared detector and manufacture method therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0029] like figure 1 and figure 2 , the embodiment of the present invention relates to an uncooled infrared detector, in particular to an uncooled infrared focal plane array detector, comprising a bridge deck 50, a bridge leg 10, an anchor column 20 and a substrate 40, the uncooled infrared detector in the prior art Cooled infrared detectors are suitable for this embodiment. The detector further includes at least one layer of auxiliary infrared absorbing layers 60 , and each auxiliary infrared absorbing layer 60 is stacked on the upper surface of the bridge deck 50 . By additionally adding an auxiliary infrared absorbing layer 60 on the top of the bridge deck 50, which cooperates with the infrared absorbing layer of the bridge deck 50, can effectively improve the infrared heat radiation absorption capacity of the detector, thereby improving the temperature response rate of the detector and reducing NETD.

[0030] Wherein, the structure of each layer of auxiliary infrared ab...

Embodiment 2

[0047] This embodiment provides an uncooled infrared detector, in which a metal conductive layer, an infrared radiation reflection layer, a sacrificial layer, a sensitive material support layer, a bridge deck infrared absorption layer, a sensitive material layer, a metal electrode layer and at least one auxiliary infrared absorbing layer, forming figure 1 Infrared detector shown. The structure of the above-mentioned auxiliary infrared absorbing layer 60 is the same as that of the auxiliary infrared absorbing layer 60 in the first embodiment above, and will not be repeated here.

[0048] The embodiment of the present invention relates to the preparation method of the above-mentioned uncooled infrared detector, comprising the following steps:

[0049] S1: Deposit and pattern a metal conductive layer and an infrared radiation reflective layer on the readout circuit;

[0050] S2: Depositing a sacrificial layer, and patterning to form support holes and electrical via holes;

[0...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to an uncooled infrared detector comprising a bridge floor, bridge legs, anchor posts, a substrate and at least one auxiliary infrared absorption layer, wherein all the auxiliary infrared absorption layer is arranged on an upper surface of the bridge floor in a laminated manner. According to the uncooled infrared detector, the auxiliary infrared absorption layer is added on a top part of the bridge floor, infrared heat radiation absorption capability of the detector can be effectively improved via cooperation between the auxiliary infrared absorption layer and an infrared absorption layer of the bridge floor, and therefore a temperature response rate of the detector can be improved while an NETD can be lowered. Each auxiliary infrared absorption layer can be made of titanium or titanium nitride or can be a multilayer structure infrared absorption layer consisting of a titanium layer, a titanium nitride layer and a non-metallic material layer or can be made of a combination material made of titanium, titanium nitride and a non-metallic material; an infrared absorption rate can be effectively improved.

Description

technical field [0001] The invention relates to an uncooled infrared detector and a preparation method of the uncooled infrared detector, in particular to an uncooled infrared detector capable of improving infrared absorption rate. Background technique [0002] The infrared absorption ability of existing uncooled infrared detectors is generally not strong enough, which affects the detection ability and application range of infrared detectors, especially in some occasions that require observation of subtle changes in temperature, such as the use of precise temperature measurement, etc., low resolution High-resolution detectors cannot distinguish small temperature differences, resulting in limited use. For this reason, high-resolution detectors can meet such applications due to their high responsivity and low NETD, so their research has become imminent. Contents of the invention [0003] Embodiments of the present invention relate to an uncooled infrared detector and a prepa...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Applications(China)
IPC IPC(8): G01J5/10
CPCG01J5/10
Inventor 马占锋黄立高健飞
Owner WUHAN GAOXIN TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap