Uncooled infrared detector and manufacture method therefor

Abstract

The invention relates to an uncooled infrared detector comprising a bridge floor, bridge legs, anchor posts, a substrate and at least one auxiliary infrared absorption layer, wherein all the auxiliary infrared absorption layer is arranged on an upper surface of the bridge floor in a laminated manner. According to the uncooled infrared detector, the auxiliary infrared absorption layer is added on a top part of the bridge floor, infrared heat radiation absorption capability of the detector can be effectively improved via cooperation between the auxiliary infrared absorption layer and an infrared absorption layer of the bridge floor, and therefore a temperature response rate of the detector can be improved while an NETD can be lowered. Each auxiliary infrared absorption layer can be made of titanium or titanium nitride or can be a multilayer structure infrared absorption layer consisting of a titanium layer, a titanium nitride layer and a non-metallic material layer or can be made of a combination material made of titanium, titanium nitride and a non-metallic material; an infrared absorption rate can be effectively improved.

Description

technical field [0001] The invention relates to an uncooled infrared detector and a preparation method of the uncooled infrared detector, in particular to an uncooled infrared detector capable of improving infrared absorption rate. Background technique [0002] The infrared absorption ability of existing uncooled infrared detectors is generally not strong enough, which affects the detection ability and application range of infrared detectors, especially in some occasions that require observation of subtle changes in temperature, such as the use of precise temperature measurement, etc., low resolution High-resolution detectors cannot distinguish small temperature differences, resulting in limited use. For this reason, high-resolution detectors can meet such applications due to their high responsivity and low NETD, so their research has become imminent. Contents of the invention [0003] Embodiments of the present invention relate to an uncooled infrared detector and a prepa...

AI Technical Summary

Problems solved by technology

[0002] The infrared absorption ability of existing uncooled infrared detectors is generally not strong enough, which affects the detection ability and application range of infrared detectors, especially in some occasions that require observation of subtle changes in temperature, such as the use of precise temperature measurement, etc., low resolution High-resolution detectors cannot distinguish small temperature differences, resulting in limited use. For this reason, high-resolution detectors can meet such applications due to their high responsivity and low NETD, so their research has become imminent.

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