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Corrugated-pipe actual service life detection tooling

A technology of actual life and detection tooling, applied in the direction of measuring device, testing of mechanical parts, testing of machine/structural parts, etc., can solve problems such as cracking and deformation of bellows, and achieve the effect of simple structure

Inactive Publication Date: 2017-02-15
PIOTECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

During use, due to external force or high temperature, the bellows will be deformed or broken

Method used

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  • Corrugated-pipe actual service life detection tooling
  • Corrugated-pipe actual service life detection tooling
  • Corrugated-pipe actual service life detection tooling

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Embodiment Construction

[0013] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0014] Such as Figure 1-Figure 3 Shown: a bellows actual life testing tool, which is composed of an upper cover plate 4, a cavity 42, a heater assembly and a transition flange 36. The heating plate assembly includes an installation base 14, a cylinder 21, a universal joint 22, a linear slide rail 15, a slider 16, a heating plate connecting piece 30, a bellows 34, and a heater 3. When the transition flange 36 is in use, the seal between the upper flange surfa...

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Abstract

A corrugated-pipe actual service life detection tooling comprises an upper cover plate, a cavity, a heater assembly and a transition flange. The upper cover plate is arranged on an upper end of the cavity. The heater assembly and the transition flange are fixed to a lower end of the cavity. A heating plate component comprises an installation pedestal, an air cylinder, a universal movable joint, a linear slide rail, a slide block, a heating plate connecting component, a corrugated pipe and a heating plate. A pump pipeline of a factory affair end is connected to a lower end flange of the transition flange. The linear slide rail is fixed to the installation pedestal. The slide block slides on the linear slide rail. The air cylinder is fixed to a lower end of the installation pedestal. The air cylinder is connected to the heating plate connecting component. A side surface of the heating plate connecting component is fixedly connected to the slide block. An upper end of the heating plate is inserted into the cavity, and a lower end is connected to the heating plate connecting component. An upper end of the corrugated pipe is fixed to the cavity, and a lower end is fixed to the heating plate connecting component. The structure is simple, through simulating an actual usage condition of a machine bench, whether the actual service life of the corrugated pipe accords with a demand of equipment is tested.

Description

technical field [0001] The invention relates to a detection device, in particular to a bellows actual life detection tool, which belongs to the technical field of semiconductor thin film deposition application and manufacture. Background technique [0002] The bellows type mechanical seal has a wide range of applications, from low temperature to high temperature, from neutral medium to corrosive medium, from low speed to high speed, and from ordinary to harsh working conditions. All of these can change the elastic rate of the bellows by changing the geometric shape of the bellows (such as inner and outer diameters, wave plate thickness and wave number, etc.) and the elastic modulus of the material. According to the corrosion performance of the medium, different bellows materials are selected. [0003] In the existing semiconductor coating equipment, the bellows is in a key position, and the ambient temperature is relatively high, and the interior is in a vacuum state. At t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01M13/00
Inventor 国建花吴凤丽
Owner PIOTECH CO LTD
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