Double-detector micro near-infrared spectrometer with whole spectral band of 800-2,500nm
A near-infrared spectrometer and dual-detector technology, applied in the field of spectral measurement, can solve the problems of inability to preprocess the spectrum, obtain continuous spectrum, poor wavelength resolution, etc., achieve improved control stability and precision, and stable optical path structure , The effect of reducing the volume of the instrument
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[0025] The present invention will be further described below in conjunction with accompanying drawing.
[0026] see figure 1 , in one embodiment of the present invention, the optical path system of miniature near-infrared spectrometer is composed of near-infrared light source 1, incident slit 2, concave collimator mirror 3, MOEMS scanning grating micromirror 4, concave imaging mirror 5, exit slit 6 , 500nm-1700nm single-tube near-infrared detector 7 and 900nm-2600nm single-tube near-infrared detector 8.
[0027]In this embodiment, the optical path system of the improved Czerny-Turner structure is adopted, and the MOEMS scanning grating micromirror 4 is used as the optical axis. Two groups of concave collimating mirrors 3 with a diameter of 100mm, the vertical axis distances from the center of mass of the two to the optical axis are 16.5mm and 19.5mm respectively, and the off-axis angles are -10 o and 5 o , the rotation angle of MOEMS scanning grating micromirror 4 is ±6.5 ...
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