An electronic hf heating and cooling system

Abstract

The invention relates to the technical field of semiconductor manufacturing, in particular to an electronic HF (hydrogen fluoride) temperature increasing and decreasing system which comprises a heat exchange box (1) with a chemical channel. Semiconductor chilling plates (2) are respectively arranged on the left side and the right side of the heat exchange box (1), heat conduction plates (3) arranged among the semiconductor chilling plates (2) and the heat exchange box (1), a cooling water tank (4) is arranged on the other side of each semiconductor chilling plate (2), a heat exchange box chemical liquid outlet (5) is formed in the upper portion of the side surface of the heat exchange box (1), a heat exchange box chemical liquid inlet (5) is formed in the lower portion of the side surface of the heat exchange box (1), cooling water tank circulation ports (7) are formed in the side surfaces of the cooling water tank (4), and the semiconductor chilling plates (2) are connected with a switch power supply through a current control modules. The system abandons a traditional high-temperature quartz / stainless steel heater and an ice compression machine, heating can be achieved, cooling can be also achieved, and safety, maintenance performance and environmental protection performance are improved.

Description

[technical field] [0001] The invention relates to the technical field of semiconductor manufacturing, in particular to an electronic HF heating and cooling system. [Background technique] [0002] In the semiconductor manufacturing process, constant temperature and constant concentration chemicals (such as HF, AL-E, etc.) must be used in the RCA cleaning / etching process to control the cleaning / etching effect to remain stable and consistent. With the advancement of the semiconductor manufacturing process, the requirements for the allowable temperature range are becoming more and more stringent, basically increasing from the original 23±3°C to 23±1°C. Most of the high-purity chemicals currently used for cleaning are heated in chemical tanks with quartz tubes / stainless steel heaters and cooled with compressed ice machines / factory cooling water. Generally speaking, the heating process and the cooling process cannot use common pipelines and heat exchangers, and must be separately...

AI Technical Summary

Problems solved by technology

The compressor has low efficiency, high noise and bulky volume

Difficult to maintain and operate

Traditional heating / cooling control consists of separate heating components and cooling components, which are usually independently controlled by independent thermostats. Coordinated control is difficult, and it is difficult to precisely control the temperature

Since the equipment must be equipped with an independent heating system and cooling system at the same time, the probability of equipment failure will increase; the volume and occupied area of ​​the equipment will also increase, and the workload of design, operation and maintenance will increase.

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