Method and device for preparing flexible electronic circuit through liquid metal
A liquid metal and electronic circuit technology, applied in printed circuit, metal material coating technology, electrical components, etc., can solve the problems of difficult liquid metal spreading, high requirements for experimental equipment, low production efficiency, etc., to achieve small size The chemical, preparation method is simple and easy to use, and the effect of flexible use
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[0035] In this embodiment, the preparation device of the flexible electronic circuit is as figure 1 As shown, it includes a vacuum chamber 1 , a target pool 3 located in the vacuum chamber, a substrate 9 and a substrate holder 2 . The flexible substrate is fixed on the surface of the substrate 9 , and the substrate 9 is fixed by the substrate frame 2 and located above the target pool 3 .
[0036] The vent pipe 6 communicates with the vacuum cavity 1 . The vacuum unit 4 communicates with the vacuum cavity 1 .
[0037] The manufacturing device of the flexible electronic circuit also includes an electrostatic application unit 8 for applying electrostatic charges on the surface of the flexible substrate. The displacement control unit 7 is connected to the electrostatic application unit 8 and can control the displacement of the electrostatic application unit 8 .
[0038] In this embodiment, the electrostatic application unit 8 includes an electrostatic scanning probe and a power...
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