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Multicode grating ruler

A technology of grating ruler and multi-code track, which is applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problem of wasting the precision measurement ability of grating ruler, and achieve the effect of simple structure, reliability and low cost

Active Publication Date: 2017-03-15
SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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AI Technical Summary

Problems solved by technology

In addition, the accuracy of this grating scale depends on the accuracy of the reference point detection, and the detection accuracy of the reference point is generally much lower than the resolution of the incremental part of the grating scale, which wastes the precision measurement capability of the grating scale in a certain sense

Method used

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  • Multicode grating ruler

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Embodiment Construction

[0024] The present invention will be further described below with reference to the accompanying drawings and in conjunction with the preferred embodiments.

[0025] see figure 1 , a multi-code-track grating ruler, comprising a first grating code track G1, a second grating code track G2, a linear gradient filter code track A, two grating reading heads R1, R2 and a gradient film reading head R3, the The first grating code track G1, the second grating code track G2 and the linear gradient filter code track A are parallel to each other, and the two grating reading heads R1 and R2 correspond to the first grating code track G1 and the second grating code track G2, the gradient chip reading head R3 is set corresponding to the linear gradient filter code track A, the first grating code track G1, the second grating code track G2 and the linear gradient filter track A are arranged to move horizontally along the length direction, the two grating read heads R1, R2 and the gradient chip r...

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Abstract

The invention discloses a multicode grating ruler, a measurement device and a data processing method. The grating ruler comprises a first grating code track, a second grating code track, a linear gradual change optical filter code track, two grating reading heads and a gradual change sheet reading head, wherein the three code tracks are arranged side by side in parallel, the two grating reading heads are arranged to be opposite to the first grating code track and the second grating code track, the gradual change sheet reading head is arranged to be opposite to the linear gradual change optical filter code track, the three code tracks are arranged to move horizontally along a length direction, the two grading reading heads and the gradual change sheet reading head maintain fixed and respectively detect the first grating code track, the second grating code track and the linear gradual change optical filter code track by use of laser with a wavelength of lambda, the grating reading heads obtain shift-interference phase information of the grating ruler, and the gradual change sheet reading head obtain shift-reflection light intensity information of a gradual change sheet. According to the invention, while the measurement precision and the measuring range are guaranteed, the system complexity and the cost of an absolute grating ruler are also substantially reduced.

Description

technical field [0001] The invention relates to the field of grating ruler measurement, in particular to a multi-code grating ruler. Background technique [0002] The grating ruler is an important measurement tool in precision measurement and precision machining. As a key component of the grating ruler, the grating acts as a reference scale in the measurement. Absolute grating scale does not need to move to zero in a large range before measurement, and can provide absolute displacement information in real time during the measurement process, and the cumulative error is small, which is the development trend of grating scale technology. [0003] In the existing technical solution, the absolute grating scale is generally a grating type with reference points, and the measurement of absolute displacement is realized by detecting several discrete reference points in the range. Strictly speaking, the grating ruler of this principle is a "quasi-absolute" grating ruler, that is, the...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
CPCG01B11/02
Inventor 倪凯李星辉肖翔周倩王欢欢曾理江袁伟涵苏晓王晓浩
Owner SHENZHEN GRADUATE SCHOOL TSINGHUA UNIV
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