Evaporation coating device for organic EL element

Abstract

The invention discloses an evaporation coating device for an organic EL element. The evaporation coating device comprises a closed vacuum chamber; a container for placing an organic matter is arranged at the bottom of the vacuum chamber; the upper end of the container is provided with an opening; a substrate is fixedly arranged above the opening of the container; a heating wire is twined at the periphery of the container; and the heating wire has a certain distance from the outer wall of the container. According to the evaporation coating device for the organic EL element provided by the invention, the heating wire is heated to a certain temperature by virtue of an alternating-current power supply device, and the heat is radiated out in the form of thermions and is transferred to the container so as to heat the organic matter so that the organic matter can be evaporated; and compared with a traditional evaporation coating device which adopts a method that the heating wire is in contact with the container, the evaporation coating device disclosed by the invention realizes more uniform temperature rise of the container, so the organic matter can be evaporated stably and the coating effect can be improved.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating, and in particular relates to an organic EL element evaporation coating device. Background technique [0002] Vacuum coating is to place solid materials in a vacuum chamber, and under vacuum conditions, the solid materials are heated and evaporated, and the evaporated atoms or molecules can freely spread on the wall of the container. When some processed substrate materials are placed in it, the evaporated atoms or molecules will be adsorbed on the substrate to gradually form a thin film. There are two methods of vacuum coating, one is evaporation coating, the other is sputtering coating. [0003] The traditional evaporation coating of organic EL elements is completed in a vacuum chamber. The container used to place the organic matter is heated up under the action of the heat source, so that the organic matter evaporates and the coating is completed. However, if the organic matter is heated...

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Problems solved by technology

[0003] The traditional evaporation coating of organic EL elements is completed in a vacuum chamber. The container used to place the organic matter is heated up under the action of the heat source, so that the organic matter evaporates and the coating is completed. However, if the organic matter is heated unevenly, resulting in uneven evaporation, the EL element The coating will also be uneven, which will affect the coating effect

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