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An assembled mask device

A technology of mask plate and pressing plate is applied in the field of assembled mask plate device to achieve the effect of realizing preparation, improving utilization rate and improving flexibility

Inactive Publication Date: 2018-12-18
INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] At present, there is no uniform standard for the design and manufacture of masks, but the quality of mask devices plays an important role in the preparation of high-performance thin films.

Method used

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  • An assembled mask device
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  • An assembled mask device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Such as figure 1 As shown, the embodiment of the present invention provides an assembled mask device, the mask device has a mask platen, and the components are connected by screws, including a laminated and assembled mask platen 12, a mask plate 13 and a sample frame plate 14 , the mask plate 13 is located between the template platen 12 and the sample frame plate 14 .

[0038] The mask platen 12 includes a plurality of circular screw holes 121 and deposition windows 122, the deposition windows 122 are arranged in a two-dimensional array, and a circular screw hole 121 is respectively set near the four corners of each deposition window, and the deposition windows 122 are arranged in a two-dimensional array. The area is larger than that of the square sample slot 142 on the sample frame, and the function of the deposition window is not to block the deposition material, while other parts of the mask platen can play the role of pressing the mask plate.

[0039] The mask plat...

Embodiment 2

[0050] Such as figure 2 As shown, the embodiment of the present invention provides an assembled mask plate device, which has a dispersed mask plate and a sample cover plate, including a laminated and assembled dispersed mask plate 22, a sample frame plate 23, and a sample cover plate 25 , that is, the sample frame plate 23 is located between the dispersion mask plate 22 and the sample cover plate 25 .

[0051]The dispersed mask 22 includes screw holes 221 and mask patterns 222. The dispersed mask is composed of a plurality of independent mask units, and the plurality of mask units are arranged in a two-dimensional array. At the four corners of each mask unit A screw hole 221 is provided at each place, and each mask plate unit has a different mask pattern, which is suitable for the preparation of thin films and metal electrodes of different devices.

[0052] The sample frame plate 23 includes a screw hole 231 and a square sample slot 232. A plurality of square sample slots ar...

Embodiment 3

[0059] Such as image 3 As shown, the present invention provides an assembled mask device, which has a sample holder and a sample bead, including an assembled mask 32 and a sample frame plate 33, as well as a sample holder 34 and a sample bead 35;

[0060] The mask plate 32 includes a screw hole 321 , a mask pattern 322 and a sample number hole 323 . Multiple identical mask patterns are arranged in a two-dimensional array, and multiple identical mask patterns can be formed at the same time; the surface of the mask plate is etched with a penetrating sample number hole 323, and each mask pattern corresponds to a sample number hole 323, can be used for automatic numbering of thin film samples, and at the same time it is convenient to distinguish different masks.

[0061] The sample frame plate 33 includes a screw hole 331 , a square sample slot 332 , a sample slot edge notch 333 , a sample slot corner notch 334 and a sample frame number 335 . A plurality of square sample slots ...

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PUM

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Abstract

The invention discloses a spliced mask plate device. The spliced mask plate device comprises a plurality of mask plates, a sample frame, a mask plate pressing plate, a sample cover plate, a sample clamp and a sample pressing bar. The parts can be spliced and connected together by way of screws, adhesive tapes, glue or a magnetic force and the like. The mask plate device can be repeated used in a cross manner, so that the designing and manufacturing flexibility is improved. The mask plate device can realize preparation of a high-quality patterned film. Meanwhile, the mask plate device further can be suitable for irregularly shaped samples and devices with different depositing directions.

Description

technical field [0001] The invention relates to the field of thin film deposition, in particular to an assembled mask plate device, which is used for depositing patterned thin films in the process of semiconductor device preparation. Background technique [0002] In the research and production of devices such as solar cells, light-emitting diodes, photodetectors, and transistors, it is often necessary to use mask devices to form thin-film materials with specific patterns, especially patterned metal electrode materials. These mask plate devices are often applied in equipment such as thermal evaporation, electron beam evaporation, magnetron sputtering, chemical vapor deposition and atomic layer deposition. There are many ways to process the mask, and the common ones are photochemical etching, laser etching and mechanical processing. [0003] At present, there is no uniform standard for the design and manufacture of the mask, but the quality of the mask device plays an importa...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C16/04C23C14/04
CPCC23C14/042C23C16/042
Inventor 刘孔曲胜春王智杰岳世忠任宽宽孙阳
Owner INST OF SEMICONDUCTORS - CHINESE ACAD OF SCI