A preparation method of driving pump based on p(vdf-trfe) piezoelectric film
A technology of piezoelectric film and driving pumps, which is applied to pumps with flexible working elements, pumps, mechanical equipment, etc., can solve the problems of complex process and large driving voltage, and achieve the effect of simple operation and low cost
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[0027] refer to figure 1 , the preparation method of the driven pump based on P(VDF-TrFE) piezoelectric film of the present invention comprises the following steps:
[0028] 1) Prepare P(VDF-TrFE) solution;
[0029] 2) Prepare P(VDF-TrFE) piezoelectric film 2 by P(VDF-TrFE) solution;
[0030] 3) Engraving and preparing the first support layer 1, the second support layer 4 and the channel layer 3 required to drive the pump;
[0031] 4) Graphical preparation of the first adhesive layer 6, the second adhesive layer 7 and the third adhesive layer 8 required to drive the pump;
[0032] 5) preparing a working electrode 5 on the P(VDF-TrFE) piezoelectric film 2 obtained in step 2);
[0033] 6) The first support layer 1, the first adhesive layer 6, the P (VDF-TrFE) piezoelectric film 2, the second adhesive layer 7, the channel layer 3, the third adhesive layer 8 and the second support layer 4 Align the connections sequentially from top to bottom, and then connect the test leads to...
Embodiment 1
[0043] The preparation method of the driven pump based on P(VDF-TrFE) piezoelectric thin film of the present invention comprises the following steps:
[0044] 1) Use an electronic balance to take 2 mg of P(VDF-TrFE) powder into a jar, then use a pipette to measure 10 ml of DMF, add it to the jar, and place the jar on a magnetic On the stirrer, stir at room temperature for 3 hours until the P(VDF-TrFE) powder is completely dissolved, and the solution is colorless and transparent;
[0045] 2) Filter the solution obtained in step 1) using a syringe filter with a pore size of 5 microns and a pore size of 1 micron, and then let it stand for 24 hours;
[0046] 3) Using glass as the substrate, spin-coat the solution on the surface of the glass substrate using a homogenizer, the speed of the homogenizer is 3000 rpm, and the homogenization time is 40 seconds;
[0047] 4) Place the glass sheet coated with the P(VDF-TrFE) solution on a hot stage at 75° and dry for 10 minutes to evaporat...
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