System and method for enhancing production capacity

A technology of production capacity and level, which is applied in the system of improving production capacity and in the field of improving production capacity, can solve problems such as instability of machine components, risk expansion, product scrapping, etc., and achieve the effect of improving production capacity and reducing failure risk

Inactive Publication Date: 2017-04-26
SEMICON MFG INT (SHANGHAI) CORP +1
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when machine components fail or perform unstable, it often leads to a decrease in production capacity, and even the risk of a large number of product obsolescence (OOC / OOS)
[0003] The component failure (alarm) of the machine often affects the instability of its production capacity. However, the current production mode only takes improvement measures for the machine when the production capacity is not good. This is often not timely enough and the risk may increase
[0004] At present, only when the production capacity of the machine is not good or it is scrapped, the improvement measures are taken for the machine, which is not timely enough and the risk may expand
At present, each factory only has a predictive adjustment system (Automatic Process Control, Automatic Process Control, APC system) for the parameters of the machine recipe (recipe) to improve production capacity; , but there is no effective prevention and improvement system, often wait until the Cpk is not good, only to find that it is caused by the instability of the machine components, it is too late

Method used

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  • System and method for enhancing production capacity
  • System and method for enhancing production capacity
  • System and method for enhancing production capacity

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Embodiment Construction

[0025] In the following description, numerous specific details are given in order to provide a more thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without one or more of these details. In other examples, some technical features known in the art are not described in order to avoid confusion with the present invention.

[0026] It should be understood that the invention can be embodied in different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the invention to those skilled in the art. In the drawings, the size and relative sizes of layers and regions may be exaggerated for clarity. Like reference numerals refer to like elements throughout.

[0027] The terminology used herein is for the purpose of describing part...

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Abstract

The invention provides a system and a method for enhancing production capacity. The system comprises an analysis model module and a production forecasting module, wherein the analysis model module is used for collecting historical failure data and inline data of a machine component, so as to establish a forecasting model for failures and the inline data of the machine component; and the production forecasting module is used for forecasting capacity level of a machine by means of the forecasting model, and arranging a priority order of the machine. The system can discover the failures of the machine component timely, thereby enhancing the capacity level and reducing the risk of failure. The method for enhancing the production capacity has the same advantages.

Description

technical field [0001] The invention relates to the field of semiconductor production, in particular to a system and a method for improving production capacity. Background technique [0002] At present, the factory uses an inline monitor to monitor the production capacity (Cpk) of the factory. However, when machine components fail or perform unstable, it often leads to a decline in production capacity, and even the risk of a large number of product obsolescence (OOC / OOS). [0003] The component failure (alarm) of the machine often affects the instability of its production capacity. However, the current production mode only takes improvement measures for the machine when the production capacity is not good. This is often not timely enough and the risk may increase. [0004] At present, only when the production capacity of the machine is not good or it is scrapped, improvement measures are taken for the machine, which is not timely enough and the risk may increase. At presen...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06Q10/06
CPCG06Q10/06375
Inventor 余志贤
Owner SEMICON MFG INT (SHANGHAI) CORP
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