Etching equipment, and processing method and processing device for ending automatic task of etching equipment

Abstract

The embodiment of the invention provides etching equipment, and a processing method and processing device for ending an automatic task of the etching equipment. The processing method for ending the automatic task of the etching equipment comprises the following steps of: receiving a current automatic task ending request sent by a user; judging whether a task tray needing to be processed by a current automatic task leaves a CM or not; if the task tray leaves the CM, judging whether residual action sequences of the current automatic task comprise an action of filling atmosphere in the CM or not; if so, removing the action of filling atmosphere in the CM from the residual action sequences; judging whether the CM is in a vacuum state or not; when the CM is not in the vacuum state, creating an action of vacuumizing the CM in the residual action sequences; creating an action of unloading the CM at the tail of the residual action sequences; and sequentially executing the residual action sequences. By means of the etching equipment, and the processing method and processing device for ending the automatic task of the etching equipment provided by the invention, the condition that manual processing is needed in a process of ending the automatic task of the etching equipment is avoided; the use difficulty of the equipment is reduced; and the intelligence level is increased.

Description

technical field [0001] The invention relates to the technical field of etching, in particular to a processing method for ending an automatic task of an etching equipment, a processing device for ending an automatic task of an etching equipment, and an etching equipment. Background technique [0002] In an improved single cavity LED (Light Emitting Diode, light emitting diode) etching equipment (tool), such as figure 1 As shown in the figure, the cassette chamber (CM) is designed to have only two positions for loading and unloading. When performing an automatic task, the control system controls the transfer module (TM, Transfer Module) to take out the tray from the pick-up position, and transfers the tray to the process chamber (PM, Process Module). ) Put the tray back to the film position, unload the CM, and the processing is completed. [0003] In order to improve the productivity of the machine, the related technology provides an automatic task mode for continuous produc...

AI Technical Summary

Problems solved by technology

At this time, all the action sequences of pallet 1 are: S1'-S2'-S3'-S4'-S5'-S8', the control system will send back to CM after processing pallet 1, and because CM is Atmospheric state, the valve still cannot be opened due to the pressure difference, and the CM needs to be manually vacuumed

[0017] The disadvantage of the above-mentioned related technologies is that no matter when the operator requests to end the automatic task, the control system will execute the processing of the pallet 1 according to the defined action sequence

Both of the above two end timings require manual intervention, that is, the control system increases the operating difficulty of the operator

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