Observation window sealing structure and equipment with the sealing structure

Abstract

The invention provides an observing window seal structure and device with the same structure. The observing window seal structure is used to install on an observing passage of a cavity chamber which includes a step mating face; the observing window seal structure comprises a first circular gasket which attaches the step mating faces observing glasses which comprises a first surface and a second surface relatively, the first surface faces the cavity chamber, an aperture is formed between edges around the second surface and observe passage; a seal ring installed inside the aperture completely touches with observing glasses and inner wall of observing passage; as well as a stop dog around observing passage stalled on the wall of the cavity chamber is covered aperture at least and sealed with the first surface of the observing glass. The observing window seal structure has the advantage of being convenient in installation,simple in taking down seal ring and good in sealing performance.

Description

technical field [0001] The invention relates to a sealing structure of an observation window and equipment with the sealing structure. Background technique [0002] PECVD (Plasma Enhanced Chemical Vapor Deposition, plasma-enhanced chemical vapor deposition device) is often used in TFT-LCD (Thin Film Transistor-Liquid Crystal Display, thin-film transistor liquid crystal display), thin-film solar industry, and is used for coating on substrates. The coating process is carried out in a closed process chamber. In some cases, the state in the process chamber, such as: substrate cracking, center pin cap falling off, grounding (Grounding) fracture, etc., needs to be confirmed visually. Usually, an observation window (ViewWindow) is provided on the wall of the process chamber for checking the conditions inside the chamber. Since PECVD equipment performs plasma chemical vapor deposition in a vacuum and high temperature environment, the observation window needs to have the characteris...

AI Technical Summary

Problems solved by technology

[0008] 1) It is difficult to install the O-ring: the O-ring is installed inside the channel, and the O-ring needs to be fully attached to the thin glass and the surrounding walls of the channel in advance, but the O-ring is easy to sag. When filtering UV When the glass is squeezed inward, the drooping part of the O-ring is in contact with the front of the filter UV glass, and the O-ring is not squeezed into contact with the wall, so the sealing effect cannot be achieved, and repeated disassembly and assembly will increase the difficulty of the operation;

[0009] 2) Difficult removal of the O-ring: The O-ring is usually stuck to the inner wall of the channel and the thin glass under long-term high-temperature extrusion, and it is not easy to remove

The stopper is removed from the outside, and there is no stress point. The current method can only be knocked from the inside of the chamber with a hard object;

[0010] 3) The filter UV glass and thin glass are easy to break and cause large losses: During the dismantling operation, the filter UV glass and thin glass are easy to be broken and cause losses. There are many process chambers on the PECVD equipment, and the number of observation windows in each chamber is large. And the cost of filtering UV glass and thin glass is high, which greatly increases the loss;

[0012] It can be seen that the PECVD equipment in the prior art has difficulty in removing the O-ring, easily causing breakage of the filter UV glass and sheet glass, and long replacement work time, etc.

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